I roto i te haurua-ā-ira-I roto i ngā whakamātautau tukanga taputapu, ko te horoi matū e pā ana ki te tango i ngā poke kino, i ngā poke hinu rānei e piri ana ki ngā mata o ngā semiconductors, ngā rauemi whakarewa me ngā taputapu taiwhanga. Ka whakamahia e te horoi ngā matū me ngā whakarewa waro hei whakaoho i ngā tauhohenga matū me ngā pānga whakarewa me ngā poke me ngā poke hinu e piri ana ki ngā mata o ngā mea mahi. Ka taea hoki te whakamahi i ngā mahi ā-tinana pēnei i te ultrasonication, te whakamahana me te papu korehau hei tango i ngā poke mai i ngā mata o ngā mea mahi. Kātahi ka horoia ngā mea mahi ki te nui o te wai nui.-parakore wera-me-wai matao kua whakakorea te ion hei hanga i ngā mata ma.
1.1 Te Hiranga o te Horoi Matū
Me horoi matū te tikanga mō ia whakamātautau tukanga. He pānga nui te kounga o te horoi matū ki ngā hua o te whakamātautau. Tērā pea ka kore e angitu, ka ngoikore rānei te horoinga.-ngā putanga whakamātautau kounga. Nō reira, he mea nui te mārama ki ngā mahi me ngā mātāpono o te horoi matū kia angitu ai ngā whakamātautau tukanga.
E mōhiotia whānuitia ana, ko tētahi āhuatanga matua o ngā semiconductors ko tōna tino aro ki ngā poke. Ahakoa ngā poke iti i ngā wāhanga-mō ia-Ka taea e te taumata miriona te whakarerekē i ngā āhuatanga ā-tinana o ngā haurua-ā-ira. Ka whakamahia tēnei āhuatanga hei hanga i ngā taputapu haurua-ā-ira me ngā mahi rerekē mā te tāpiritanga. Heoi anō, ka hangaia e tēnei āhuatanga anō he wero mō ngā haurua-ā-ira-ngā whakamātautau tukanga taputapu. Ka taea e ngā matū matū, ngā taputapu tukatuka me te wai horoi te mahi hei pūtake o te poke kino. Ahakoa ngā papa semiconductor parakore ka pāngia e te poke kitea i muri i te roa o te wā e noho ana ki te hau taiao. Ka whakakorea e te horoi matū te poke kino, ā, ka pupuri i te silicon kia ma.-ngā mata papatahi.
1.2 Te whānuitanga o te horoi matū
E toru ngā wāhanga matua o te horoi matū:
Te horoi i te silicon-ngā mata papatahi;
Te horoi i ngā rauemi whakarewa (hei tauira, ngā miro tungsten mō ngā irahiko mimiti, ngā rau molybdenum mō ngā tautoko mimiti, ngā koranu konumohe mō ngā pūtake mimiti, te chromium mō te chromium-te hanga kanohi);
Te horoi i ngā taputapu me ngā oko (hei tauira, ngā tīpene whakarewa, ngā ngongo kuata, ngā ipu karāhe, ngā pokepokea ai te karāhe, ngā hua kirihou me te rapa).
1.3 Ngā Momo Parakore i runga i te Silicon-Ngā Mata Angiangi
(1) Ngā ngota ngota-Momo Whakapūtanga Parakore
Ngā ngota ngota noa-ngā poke e piri ana ki te silicon-Kei roto i ngā mata o te papa angiangi ngā hinu, ngā kapia me ngā hinu tūturu, ngā hinu hangai rānei. Ko ngā poke i puta mai i te wā e tapahi ana, e huri ana, e whakakanapa ana i te papa, ka taka ki roto i tēnei kāwai. Ko ētahi atu pūtake ko ngā tapumati, ngā toenga photoresist me ngā toenga rauropi.-ngā putunga whakarewa.
Ngā ngota-Ko te nuinga o ngā momo poke ka mimitihia ā-tinana, ka herea ki te silicon-ngā mata o te angaanga mā te kukume hiko. Ko ngā ngota o ngā hinu, ngā kapia me ngā hinu he mea kore noa iho-pōro. Ka puta te hononga mai i te kukume i waenga i ngā ngota poke koretake me ngā kaha toenga kore e makona o ngā ngota silicon mata. He rite tēnei taunekeneke ki ngā kaha van der Waals i waenga i ngā ngota i roto i ngā tioata ngota. He ngoikore te kaha kukume o ēnei kaha, ā, ka tere te pirau me te piki haere o te tawhiti i waenga i ngā ngota. Ko te whānuitanga taunekeneke whai hua he tata ki te 2-3×10⁻⁸henimita (2-3 Å), e rite ana ki ngā diameter ngota. Nō reira, ko te ngota-ka taea te tango ngāwari i ngā momo poke.
Ko tētahi atu āhuatanga nui ko te nuinga o ngā ngota ngota-ko ngā momo poke he wai-ngā pūhui waro kore-rewa. Nā te mimiti ka puta te silicon-he wai-kore ngā mata o te papa, e aukati ana i te whakapā whai hua i waenga i te wai/waikawa kua tangohia te ioni-ngā otinga kawakore me ngā mata papatahi. Ka ārai tēnei i te taunekeneke a ngā matūriki ki ngā matūriki mata, ā, ka ārai hoki i te horoinga matū whai hua.
(2) Ionic-Momo Whakapūtanga Parakore
Ātiona noa-ngā poke e piri ana ki te silicon-kei roto i ngā mata papatahi ko K⁺, Nā⁺, Ca²⁺, Mg²⁺, Fe²⁺, H⁺, OH⁻, F⁻, Cl⁻, S²⁻, CO₃²⁻me ērā atu anō. I ahu mai ēnei poke i ngā momo pūtake rerekē: te hau taiao, ngā taputapu me ngā taputapu, ngā matū, ngā mea iti-te wai parakore kua tangohia te ioni, te wai puna, te manawa i puea ake me te werawera o te kaimahi.
Ionic-Ko te momo adsorption he mea nui ki te chemisorption. Ka piri ngā katote poke ki ngā mata o te wafer mā te matū-ngā kaha here. He tino poto te tawhiti taurite i waenga i ngā katote poke me ngā ngota mata, ā, ka kiia pea ngā katote kua mimitihia hei wāhanga o te whatunga silicon. Ka taea e ngā poke ionic kua mimitihia te mahi hei pokapū hopu: ka herea e ētahi ngā irahiko whatunga kore utu, ā, ka mahi hei kaiwhiwhi; ko ētahi ka mau i ngā kōhao kore utu, ā, ka mahi hei kaituku. Nā te kaha o ngā kaha mimiti ionic, he tino uaua ake te tango i ngā poke ionic i te whakakore i ngā poke ngota.
(3) Atomika-Momo Whakapūtanga Parakore
Atomika-Ko ngā poke o te mata he ngota konganuku pēnei i te koura, te hiriwa, te parahi, te rino me te nikara. Ko ēnei ngota konganuku ka puta mai i ngā tauhohenga nekehanga whakaiti i roto i ngā mea etching waikawa ana, ka whakatakotoria ki runga i te silicon.-ngā mata papatahi.
Atomika-Ko te momo mimiti te mea e whakaatu ana i te kaha here kaha rawa atu, ā, ko te mea tino uaua ki te whakakore.-Kāore e tino tauhohe ngā ngota konganuku pēnei i te koura me te konukawata ki ngā waikawa me ngā kawakore noa. Nō reira, me whakamahi ngā matū motuhake pēnei i te aqua regia hei hanga i ngā matū wairewa. Ka horoia atu ngā momo konganuku matatini ki te wai nui.-wai parakore kua whakakorea te ioni.
1.4 Whānui Silicon-Te Tukanga Horoi Wafer
E ai ki te tātaritanga i runga ake nei, ko te ngota ngota-he ngāwari noa iho te tango i ngā momo poke. Ka taea e ngā poke ngota ngota e toe ana te huna i ngā āhuatanga ionic-me te ngota-ngā momo poke me te aukati i tō rātou tangohanga. Nō reira, me whakakore katoa ngā poke ngota i te tuatahi i te wā o te silicon-te horoi matū o te wafer.
Ionic-me te ngota-Ka mimitihia ngā momo poke ki te matū me te kaha o te hononga ki te mata. He iti noa te rahinga o ngā poke ngota, ā, he ngoikore ki ngā waikawa me ngā kawakore noa; ka taea anake te whakarewa mā te wai regia, te hauwai waikawa rānei.-ngā otinga peroxide. Ka whakarewahia hoki e te Aqua regia me te hauwai peroxide waikawa ngā poke ionic. Ka whakamahia e te tukanga mahi paerewa te waikawa-ngā otinga kawakore, te hauwai waikura kawakore rānei hei tango i ngā poke ionic i te tuatahi. Kātahi ka tangohia ngā poke ionic me ngā poke ngota mā te whakamahi i te aqua regia, te hauwai waikura waikawa rānei. He horoinga whakamutunga ki te wai teitei-Mā te wai parakore kua tangohia te ionioni ka oti te tukanga.
Hei whakarāpopototanga, ko te silicon whānui-Ko te raupapa horoinga o te wafer ko: Te tango hinu→Te tango i te katote→Atomika-te tango i te poke→Kua whakakorea te ioni-te horoi wai.
Me horoi ngā papa silicon i mua i ia whakamātautau. Heoi anō, he rerekē ngā āhuatanga o te mata i ia whakamahinga. Nō reira, he rerekē ngā matū horoi me ngā whāinga matua. He ngāwari ngā tukanga horoi mahi. Me whakatau ngā tikanga me ngā mahi tuturu i runga i tētahi take.-by-te kaupapa o te horoinga tuturu-ngā whakaritenga pānga.
1.5 Te Maimoatanga Horoi mō ngā Mea Whakarewa me ngā Taputapu Noa
Ko ngā rauemi whakarewa me ngā taputapu taiwhanga ngā pūtake nui o te silicon-te poke o te papa wafer. Me horoi pai ngā konganuku me ngā taputapu hei whakapūmau i te poke o te papa wafer-te horoi o te mata. Ko te mātāpono whānui mō te horoi i ngā konganuku me ngā taputapu ko: tangohia ngā poke hinu i te tuatahi; horoia ki te waikura, ki te kawakore, ki ngā wai horoi, ki te wai aqua regia rānei; ā, whakaotia mā te horoi pai ki te wai wera nui.-wai parakore kua whakakorea te ioni.
2 Te Mātauranga Haumaru
He maha ngā matū me ngā hau e whakamahia ana i roto i ngā whakamātautau, tae atu ki te waikawa mura, te waikawa pahū, te waikawa paitini me te waikawa waikura.-ngā matū kawakore. Tērā pea ka pā mai ngā aituā mēnā kāore i te tika te whakahaere. Me whakarite ngā mahi ārai i mua i te aituā. Mēnā ka puta he aituā, kia marino, ā, kia tere tonu te whakatinana i ngā mahi whakatika e tika ana.
2.1 Te Whakahaere Haumaru i ngā Whakarewa Waro
Ko ngā whakarewa waro noa ko te toluene, te acetone, te etanoru, te methyl ethyl ketone, te trichloroethylene me te carbon tetrachloride. Ko te nuinga o ngā whakarewa waro he mura, ā, he mura i raro i te pāmahana teitei.-ngā āhuatanga pāmahana, ngā āhuatanga tata rānei ki ngā mura ahi. Penapenahia ki ngā wāhi matao, kia matara atu i ngā pūtake mura. Kaua e whakamahana tika i ngā ipu whakarewa ki runga i ngā oumu hiko; me te wai-He pai ake te whakamahana i te kaukau ina hiahiatia te whakamahana. Mēnā ka puta he ahi, tineihia ngā mura ki te kakahu haukū, ki te onepu pai, ki te waro rānei.-ngā tinei hauhā, te waro-ngā tinei ahi tetrachloride, ngā tinei ahi pahuka rānei. Kaua rawa e ringihia he wai, he wai rānei-waikawa e hangai ana-ngā kaihoko tinei kawakore.
He pūngāwerewere ngā whakarewa rauropi, ā, he rerekē ngā taumata paitini. Me mahi ngā mahi katoa i roto i ngā taupoki auahi me te hauhautanga e tika ana.
2.2 Te Whakahaere Haumaru i ngā Waikawa me ngā Kawakore
Ka whakamahia e ngā whakamātautau he kaha-ngā otinga waikawa pērā i te waikawa whanariki, te waikawa hauota, te waikawa hauwaiora, te waikawa hauwaiora me te aqua regia, tae atu ki ngā mea kaha-ngā otinga kawakore tae atu ki te hauwai konutai me te hauwai pāhare pākawa. He tino waikura ēnei matū ki te kiri me ngā kākahu o te tangata, me āta tirotiro te haumaru whakahaere.
Tāutahia ngā pūnaha hauhautanga me ngā pūnaha whakaputa hau whai hua ki ngā wāhi ka kohia ai ngā kohu waikawa, kawakore rānei.
Me mau ngā kaiwhakahaere i ngā taputapu tiaki e tika ana pērā i ngā karapu rapa me ngā pūwero manawa.
Kaua rawa e tāpirihia he wai waikawa, he kawakore rānei ki te waha; whakamahia he paipa kua whakamaua ki ngā pūangi rapa.
Kia tūpato i te wā e kawe ana kia kore ai e taka, e pakaru rānei te pounamu. Kia anga atu ngā putunga o te pounamu kia matara atu i ngā kaimahi ina whakatuwhera ana i ngā ipu.
Tāpirihia mārire te waikawa whanariki ki roto i te wai hei whakamaroke. Kaua rawa e ringihia te wai ki roto i te waikawa whanariki kukū.
I mua i te whakaōrite, whakaranua ngā waikawa, ngā kawakore rānei kukū ki te wai, kātahi ka whakaōrite mā te whakamahi i ngā otinga kawakore, waikawa rānei e rite ana.
Me tātari katoa ngā oko kau i roto i ngā waikawa me ngā kawakore kukū i mua, me horoi kia maha ki te wai, kātahi ka horoi i ia wā.
Mēnā he waikawa-Mēnā he wera kawakore, horoia tonutia te kiko kua pāngia ki te wai rere nui. Mēnā ka pā te wai ki ngā kanohi, whakamakuku wawetia ngā kanohi ki te nui o te wai puna. Rapua he awhina hauora tonu i muri i te horoinga, ahakoa te kaha o te wera, te pānga rānei ki ngā kanohi.
2.3 Te Whakahaere Haumaru i ngā Hau
Ka tukuna ngā hau whakamātautau mā te-ngā rango pēhanga, ngā paipa hau rānei. Mā te whakaranu i ētahi hau ka mura, ka pahū rānei.
He tae ngā rango hau-kua whakakōwaea, kua tāpirihia hoki he tohu hei tautuhi i ngā hau kei roto. Ka pupuri ngā rango i te hau i te pēhanga teitei; ka eke ngā rango hou ki te 150 kg/cm²Me whai i ngā mahi ārai haumaru motuhake i te wā e penapena ana, e whakamahi ana hoki.
Āraia te whitinga tika o te rā ki ngā ipu hau i te raumati. Puritia ngā rauemi mura me ngā pūtake mura kia matara atu i te ipu.-ngā rohe rokiroki.
Penapenahia ngā takirua hau e tauhohe mura ana, e pahū ana rānei ina pā (hei tauira, ngā rango hauwai me te hāora) ki roto i ngā rūma motuhake hei karo i ngā aituā e puta mai ana i te turuturu hau.
Kaua e ringihia katoatia te hau o te rango; kia mau tonu te pēhanga toenga i roto i ngā rango.
Ārai i te poke o te hinu i ngā takirere me ngā kī o ngā rango.
I te wā e whakamahi ana i te hauwai, horoia te hau i roto i ngā taputapu ki te hau kore mahi, tirohia te pūnaha katoa mō ngā turuturu, ka tāuta i ngā ārai whakamuri.
2.4 Te Whakahaere Haumaru i ngā Matū Paitini
Ārai i te paitini i te wā e mahi ana me ngā matū paitini me ngā matū i roto i ngā whakamātautau. Ko ngā mātāpono matua mō te haumaru e whai ake nei:
Whakahaerehia ngā mahi i roto i ngā taupoki auahi. Whakaorahia ngā toenga para me ngā wai para i mua i te maka atu ki ngā wāhi haumaru kua tohua.
Mauria he māhunga me he karapu tiaki. Āta karohia te pa ki te kiri me te horomitanga o ngā mea paitini ki te waha.
Horoia rawatia ngā karapu ki te wai i mua i te tango i muri i te whakaoti i ngā whakamātautau.
Wā tuku: Hurae-30-2026