Kwi-semiconductor‑Uvavanyo lwenkqubo yesixhobo, ukucoca ngamakhemikhali kubhekisa ekususweni kokungcola okuyingozi okanye izinto ezingcolisayo zeoyile ezifunxwe phezu kwezixhobo ze-semiconductor, izinto zesinyithi kunye nezixhobo zelebhu. Ukucoca kusebenzisa ii-reagents zeekhemikhali kunye nezinyibilikisi ze-organic ukuqala iimpendulo zeekhemikhali kunye nemiphumo yokunyibilika kunye nezinto ezingcolisayo zeoyile ezifunxwe kwiindawo zomsebenzi. Iindlela zomzimba ezifana ne-ultrasonication, ukufudumeza kunye nokupompa nge-vacuum nazo zinokusetyenziswa ukususa izinto ezingcolisayo kwiindawo zomsebenzi. Izinto zokusebenza emva koko zihlanjwa ngobuninzi obukhulu bezinto eziphezulu.‑ubumsulwa bushushu‑kwaye‑amanzi abandayo acociweyo ukuze kufunyanwe iindawo ezicocekileyo.
1.1 Ukubaluleka kokucoca ngeekhemikhali
Ukucoca ngamakhemikhali kuyadingeka kuyo yonke inzame yokuvavanya inkqubo. Umgangatho wokucoca ngamakhemikhali unefuthe elibalulekileyo kwiziphumo zovavanyo. Ukucoca okungafanelekanga kunokukhokelela ekungaphumelelini okanye ekungaphumelelini.‑iziphumo zovavanyo ezisemgangathweni. Ke ngoko, ukuqonda imisebenzi kunye nemigaqo yokucoca iikhemikhali kubalulekile ukuze kwenziwe uvavanyo oluphumelelayo.
Njengoko kwaziwa kakuhle, uphawu oluphambili lwee-semiconductors kukuba zinobuthathaka kakhulu kwizinto ezingcolileyo. Kwanokulandelela ukungcola kwiindawo ezithile.‑nganye‑i-million level inokutshintsha iipropati zomzimba zee-semiconductors. Le propati isetyenziselwa ukwenza izixhobo ze-semiconductor ezinemisebenzi eyahlukeneyo ngokusebenzisa i-doping. Nangona kunjalo, le propati inye idala imingeni kwi-semiconductors.‑Uvavanyo lwenkqubo yesixhobo. Iikhemikhali, izixhobo zokucubungula kunye namanzi okucoca zonke zinokusebenza njengemithombo yongcoliseko oluyingozi lokungcola. Kwanee-wafers ze-semiconductor ezicocekileyo ziya kuba nongcoliseko olubonakalayo lokungcola emva kokuvezwa umoya ongqongileyo ixesha elide. Ukucoca iikhemikhali kususa ungcoliseko oluyingozi lokungcola kwaye kugcina i-silicon icocekile‑imiphezulu ye-wafer.
1.2 Ububanzi bokuCoca ngeeKhemikhali
Ukucoca ngamakhemikhali kuquka iindidi ezintathu:
Ukucocwa kwesilicon‑imiphezulu ye-wafer;
Ukucocwa kwezinto zesinyithi (umz., iifilaments ze-tungsten kwii-electrodes zokukhupha umphunga, amaphepha e-molybdenum okuxhasa umphunga, ii-alloys ze-aluminium kwimithombo yomphunga, i-chromium kwi-chromium‑ukwenziwa kweemaski);
Ukucocwa kwezixhobo kunye neembiza (umz., ii-tweezers zesinyithi, iityhubhu ze-quartz, izikhongozeli zeglasi, ii-graphite molds, iimveliso zeplastiki nezerabha).
1.3 Iintlobo zokungcola okungcolisayo kwiSilicon‑Iindawo ezisicaba
(1) Iimolekyuli‑Uhlobo lokuNgcola
I-molecular eqhelekileyo‑yenza izinto ezingcolisayo ezifunxwa kwi-silicon‑Imiphezulu ye-wafer iquka iigrisi zendalo okanye ezenziwe ngokwenziwa, iiresini kunye neeoyile. Ukungcola okufakwa ngexesha lokusikwa kwe-substrate, ukugaya kunye nokupolisha ikakhulu kuwela kolu didi. Eminye imithombo ibandakanya iminwe, iintsalela ze-photoresist kunye nentsalela yendalo.‑iidipozithi zesinyibilikisi.
Iimolekyuli‑uhlobo lokungcola lufunxwa kakhulu emzimbeni kwaye lubotshelelwe kwi-silicon‑Imiphezulu ye-wafer ekhatshwa yi-electrostatic. Iimolekyuli zegrisi, ii-resins kunye neeoyile azisetyenziswa kakhulu‑i-polar. Ukudibana kuvela ekutsaleni phakathi kwee-molecules ezingcolileyo ezingathathi cala kunye namandla aseleyo angonelisekanga ee-athomu ze-silicon ezingaphezulu. Olu nxibelelwano lulingana namandla e-van der Waals phakathi kwee-molecules kwiikristale ze-molecular. Amandla anjalo anomtsalane abuthathaka kwaye aphela ngokukhawuleza ngokunyuka komgama we-intermolecular. Uluhlu lonxibelelwano olusebenzayo lumalunga ne-2‑3×10⁻⁸cm (2)‑3 Å), ithelekiswa nobubanzi beemolekyuli. Yiyo loo nto iimolekyuli‑uhlobo lokungcola lunokususwa ngokulula.
Olunye uphawu oluphambili kukuba uninzi lweemolekyuli‑uhlobo lwezinto ezingcolisayo ngamanzi‑Iikhompawundi ze-organic ezinganyibilikiyo. Ukufunxwa kwazo kwenza i-silicon‑iindawo ze-wafer ezigqunywe ngamanzi azinawo umoya, nto leyo ethintela unxibelelwano olusebenzayo phakathi kwamanzi acocekileyo/i-asidi‑izisombululo ze-alkali kunye nemiphezulu ye-wafer. Oku kuthintela ii-reagents ukuba zingasebenzisani namasuntswana omphezulu kwaye kuthintela ukucoca okusebenzayo kweekhemikhali.
(2) Ionic‑Uhlobo lokuNgcola
I-ion eqhelekileyo‑yenza ukungcola okufakwe kwi-silicon‑iindawo ze-wafer ziquka u-K⁺, N / A⁺, Ca²⁺, Umphathi²⁺, Fe²⁺, H⁺, OH⁻, F⁻, Cl⁻, S²⁻, CO₃²⁻njalo njalo. Ezi zinto zingcolileyo zivela kwimithombo eyahlukeneyo: umoya ongqongileyo, izixhobo kunye nezixhobo, iikhemikhali, izinto eziphantsi‑amanzi acocekileyo angena-ion, amanzi epompo, umoya ophumayo kunye nokubila komqeshwa.
Ionic‑uhlobo lokufunxa luxhomekeke kakhulu kwi-chemisorption. Ii-ions ezingcolileyo zibophana kwiindawo ze-wafer ngokusebenzisa iikhemikhali‑amandla okubopha. Imigama elinganayo phakathi kwee-ion zokungcola kunye neeathom zomphezulu mifutshane kakhulu, kangangokuba ii-ion ezifakwe kwi-atom zinokuthathwa njengenxalenye ye-silicon lattice. Ukungcola kwe-ionic okufakwe kwi-chemisorbed kungasebenza njengeziko lokubamba: ezinye zibopha ii-electron ze-lattice zasimahla kwaye zisebenze njengezamkeli; ezinye zibamba imingxunya ekhululekileyo kwaye zisebenza njengabanikeli. Ngenxa yamandla aqinileyo e-chemisorption, ukususa ukungcola kwe-ionic kunzima kakhulu kunokususa ukungcola kwe-molecular.
(3) I-Atomic‑Uhlobo lokuNgcola
Iathomu‑Izinto ezingcolisayo kumphezulu zizinto ezisetyenziswa kakhulu njengegolide, isilivere, ubhedu, isinyithi kunye ne-nickel. Ezi athom zesinyithi zihlala ziveliswa ziimpendulo zokufuduka ezincitshiswayo kwi-acidic etchants, ezifakwa kwi-silicon‑imiphezulu ye-wafer.
Iathomu‑uhlobo lwe-adsorption lubonisa amandla okubopha anamandla kwaye kunzima kakhulu ukuyisusa.‑iiathom zesinyithi ezifana negolide neplatinum azikwazi ukusabela kakuhle kwiiasidi eziqhelekileyo kunye neealkali. Ngenxa yoko, ii-reagents ezikhethekileyo ezifana ne-aqua regia ziyafuneka ukuze kwenziwe ii-complexes ezinyibilikayo. Iintlobo zesinyithi eziyinkimbinkimbi kamva zihlanjwa ngamanzi aphezulu.‑ubumsulwa bamanzi angenazo ioyini.
1.4 I-Silicon Jikelele‑Inkqubo yokucoca iWafer
Njengoko kuhlalutywe apha ngasentla, iimolekyuli‑ukungcola okulula kakhulu ukukususa. Izinto ezingcolisayo zemolekyuli eziseleyo zinokugquma i-ionic‑kunye neeathomu‑bhala ukungcola kwaye uthintele ukususwa kwako. Ngokunjalo, ukungcola kweemolekyuli kufuneka kususwe ngokupheleleyo kuqala ngexesha le-silicon‑ukucoca ngekhemikhali ye-wafer.
Ionic‑kunye neeathomu‑ukungcola kohlobo oluthile kuxutywe ne-chemisorbed enamandla kumphezulu. Ukungcola kwe-atomic kuhlala kukho ngobuninzi obuphantsi kwaye akungeni kwi-asidi eqhelekileyo kunye ne-alkalis; kunokunyibilikiswa kuphela yi-aqua regia okanye i-hydrogen ene-asidi‑izisombululo zeperoxide. I-Aqua regia kunye ne-acidic hydrogen peroxide nazo ziyanyibilikisa ukungcola kwe-ionic. Indlela yokusebenza eqhelekileyo isebenzisa i-acid‑izisombululo ze-alkali okanye i-alkaline hydrogen peroxide ukuze kususwe ukungcola kwe-ionic kuqala. Izinto ezingcolisayo ze-ionic eziseleyo kunye nokungcola kwe-atomic emva koko zisuswa kusetyenziswa i-aqua regia okanye i-acidic hydrogen peroxide. Ukuhlamba kokugqibela nge-high‑ubumsulwa bamanzi acocekileyo bugqibezela inkqubo.
Ngamafutshane, i-silicon ngokubanzi‑Ulandelelwano lokucoca i-wafer lulandelayo: Ukususa amafutha→Ukususwa kwe-ion→Iathomu‑ukususwa kokungcola→Isusiwe‑ukuhlamba ngamanzi.
Ii-silicon wafers kufuneka zicocwe ngamakhemikhali ngaphambi kovavanyo ngalunye. Nangona kunjalo, iimeko zomphezulu ziyahluka ukusuka ekuqhutyweni ukuya ekuqhutyweni. Iikhemikhali zokucoca kunye neethagethi eziphambili ziyahluka ngokufanelekileyo. Iindlela zokucoca ezisebenzayo ziyaguquguquka. Iindlela kunye namanyathelo acacileyo aya kugqitywa kwimeko.‑by‑isiseko setyala ngokwendlela yokucoca yokwenyani‑iimfuno zesiphumo.
1.5 Unyango Lokucoca Iintsimbi Eziqhelekileyo Nezixhobo
Izinto zesinyithi kunye nezixhobo zelebhu ziindawo eziphambili ze-silicon‑Ungcoliseko lwe-wafer. Ukucocwa ngokupheleleyo kweentsimbi kunye nezixhobo kuyimfuneko ukuqinisekisa ukuba i-wafer‑ucoceko lomphezulu. Umgaqo wokucoca ngokubanzi wesinyithi kunye nezixhobo zezitya ngulo: susa kuqala izinto ezingcolisayo ngegrisi; hlamba okanye uhlambe ngee-asidi, ii-alkali, izisombululo zokuhlamba okanye i-aqua regia; uze ugqibezele ngokuhlambulula kakuhle ngamanzi aphezulu.‑ubumsulwa bamanzi angenazo ioyini.
2 Ulwazi loKhuseleko
Iimvavanyo zihlala zisebenzisa iikhemikhali kunye neegesi ezahlukeneyo, kuquka i-asidi evuthayo, eqhumayo, enobuthi kunye ne-asidi ebolileyo‑izinto ze-alkali. Ukuphathwa ngendlela engafanelekanga kunokubangela iingozi. Amanyathelo okuthintela kufuneka abekwe phambili. Ukuba kwenzeka ingozi, hlala uzolile kwaye usebenzise amanyathelo okulungisa afanelekileyo ngokukhawuleza.
2.1 Ukuphathwa ngokukhuselekileyo kwezinyibilikisi zendalo
Izinyibilikisi eziqhelekileyo zezinto eziphilayo ziquka i-toluene, i-acetone, i-ethanol, i-methyl ethyl ketone, i-trichloroethylene kunye ne-carbon tetrachloride. Uninzi lwezinyibilikisi zezinto eziphilayo ziyatsha kwaye ziyavutha xa zishushu kakhulu.‑iimeko zobushushu okanye kufutshane namadangatye avulekileyo. Zigcine kwiindawo ezipholileyo kude nemithombo yokutsha. Musa ukufudumeza izikhongozeli zesinyibilikisi ngqo kwizitovu zombane; amanzi‑Ukufudumeza ibhafu kukhethwa xa kufuneka ukufudumeza. Kwimeko yomlilo, cima amalangatye ngelaphu elimanzi, isanti ecolekileyo, ikhabhoni‑izicima-mlilo ze-dioxide, ikhabhoni‑izicimi-mlilo ze-tetrachloride okanye izicimi-mlilo ezinegwebu. Ungaze ufake amanzi okanye amanzi‑i-asidi esekwe‑izinto zokucima i-alkali.
Izinyibilikisi zendalo ziyatshintshatshintsha kwaye zinezinga ezahlukeneyo zetyhefu. Yonke imisebenzi mayiqhutywe ngaphakathi kwee-fume hood ezinee-air air ezaneleyo.
2.2 Ukuphathwa ngokukhuselekileyo kwee-Acids kunye neeAlkalis
Iimvavanyo zisebenzisa amandla‑izisombululo ze-asidi ezifana ne-sulfuric acid, i-nitric acid, i-hydrochloric acid, i-hydrofluoric acid kunye ne-aqua regia, kunye ne-strong‑izisombululo ze-alkali kuquka i-sodium hydroxide kunye ne-potassium hydroxide. Ezi zinto ziyingozi kakhulu kulusu lwabantu nakwiimpahla, zifuna ulawulo olucokisekileyo lokhuseleko lokusebenza.
Faka iinkqubo zokungenisa umoya ezisebenzayo kunye neenkqubo zokukhupha umoya kwiindawo apho umphunga we-asidi okanye we-alkali unokuqokelelwa khona.
Abaqhubi kufuneka banxibe izixhobo zokuzikhusela ezifanelekileyo ezifana neeglavu zerabha kunye nezixhobo zokuphefumla.
Ungaze usele i-pipette acid okanye i-alkali solution ngomlomo; sebenzisa ii-pipettes ezifakwe iibhalbhu zerabha.
Lumka xa uthutha ukuze uthintele ukuqhekeka okanye ukuqhekeka kwebhotile. Beka imingxuma yeebhotile kude nabasebenzi xa uvula izikhongozeli.
Soloko ufaka i-sulfuric acid kancinci emanzini ukuze inyibilike. Ungaze ugalele amanzi kwi-sulfuric acid exineneyo.
Ngaphambi kokuba unciphise i-asidi okanye ii-alkali ezixineneyo, xuba ii-asidi ezixineneyo okanye ii-alkali ngamanzi, uze wenze uhlengahlengiso usebenzisa izisombululo ze-alkali okanye ze-asidi ezifanelekileyo.
Izitya ezingenanto ebezinazo ii-asidi okanye ii-alkali ezixineneyo ngaphambili mazikhutshwe amanzi ngokupheleleyo, zihlanjwe ngamanzi ngokuphindaphindiweyo, emva koko zihlanjwe rhoqo.
Kwimeko ye-asidi‑ukutsha kwe-alkali, hlambulula izicwili ezichaphazelekileyo ngamanzi amaninzi ahambayo ngoko nangoko. Ukuba amanzi angena emehlweni, nkcenkceshela amehlo ngokukhawuleza ngamanzi amaninzi epompo. Funa unyango ngokukhawuleza emva kokuhlamba, nokuba ukutshisa kungakanani na okanye ukuba amehlo akho achaphazeleke kangakanani na.
2.3 Ukuphathwa Ngokukhuselekileyo Kweegesi
Iigesi zovavanyo zinikezelwa nge-high‑iisilinda zoxinzelelo okanye imibhobho yegesi. Ukuxuba iigesi ezithile kunokubangela ukutsha okanye ukuqhuma.
Iisilinda zegesi zinombala‑ibhalwe ikhowudi kwaye ilebheli ukuze ibone iigesi eziqulathiweyo. Iisilinda zigcina igesi kuxinzelelo oluphezulu; iisilinda ezisandula ukugcwaliswa zifikelela malunga ne-150 kg/cm²Kusetyenziswa amanyathelo okhuseleko akhethekileyo ngexesha lokugcina nokusebenzisa.
Kuphephe ukuvezwa elangeni ngqo kwiisilinda zegesi ehlotyeni. Gcina izinto ezitshayo kunye nemithombo yokutshisa kude nesilinda‑iindawo zokugcina izinto.
Gcina iigesi ezisabela ngokutsha okanye ngokudubula xa zidibene (umz. ii-hydrogen kunye nee-oxygen cylinders) kumagumbi ahlukeneyo ukuze kuthintelwe iingozi ezibangelwa kukuvuza kwegesi.
Musa ukuyikhupha ngokupheleleyo igesi yesilinda; gcina uxinzelelo oluthile oluseleyo ngaphakathi kwesilinda.
Thintela ungcoliseko lwegrisi kwiivalvu zesilinda kunye neewrenji.
Xa usebenzisa i-hydrogen, susa umoya kwizixhobo ngegesi engasebenziyo, hlola yonke inkqubo ukuba ayivuzi na, kwaye ufake izinto zokuthintela ukuvuza.
2.4 Ukuphathwa Ngokukhuselekileyo Kwezinto Ezinobuthi
Thintela ityhefu xa usebenzisa iikhemikhali ezinobuthi kunye neekhompawundi kuvavanyo. Imigaqo yokhuseleko ephambili yile ilandelayo:
Yenza imisebenzi ngaphakathi kwee-fume hood. Phatha inkunkuma kunye nolwelo ngaphambi kokuba ululahle kwiindawo ezikhuselekileyo.
Nxiba izinto zokuphefumla kunye neeglavu zokukhusela. Kuphephe ukudibana nolusu kunye nokusela izinto ezinobungozi emlonyeni nangayiphi na indlela.
Hlamba iiglavu kakuhle ngamanzi ngaphambi kokuba uzisuse emva kokugqiba ukwenza uvavanyo.
Ixesha leposi: Julayi-30-2026