Mu bijyanye n'imiti ikoreshwa mu gupima ibice (semiconductor)‑Igerageza ryo gukora ibikoresho, gusukura imiti bivuze gukuraho imyanda itandukanye yangiza cyangwa imyanda ya peteroli yinjijwe ku buso bwa semiconductors, ibikoresho by'icyuma n'ibikoresho bya laboratwari. Gusukura bikoresha imiti n'ibinyabutabire bya organic kugira ngo bitere ingaruka za chemical n'ingaruka zo gushonga hamwe n'imyanda n'imyanda ya peteroli yinjijwe ku buso bwa workpiece. Ingamba zifatika nka ultrasonication, gushyushya no gupompa vacuum nazo zishobora gukoreshwa mu gukuraho imyanda ku buso bwa workpiece. Workpieces zinyuzwamo ingano nyinshi y'amazi menshi.‑ubushyuhe bukabije‑na‑amazi akonje yakuwemo ioni kugira ngo haboneke ubuso busukuye.
1.1 Akamaro ko gusukura imiti
Gusukura imiti birakenewe kuri buri gikorwa cyo gupima. Ubwiza bw'isukura imiti bugira ingaruka zikomeye ku bisubizo by'igerageza. Gusukura nabi bishobora gutuma ibintu bitagenda neza cyangwa bigatera ikibazo.‑ibisubizo by'igerageza byiza. Kubwibyo, gusobanukirwa imikorere n'amahame yo gusukura imiti ni ingenzi kugira ngo igerageza rigende neza.
Nkuko bizwi, kimwe mu bintu by'ingenzi bigize semiconductors ni uko zibasha kwihanganira imyanda cyane. Ndetse no ku bice byazo hagaragara imyanda.‑kuri buri‑miliyoni y'urwego rushobora guhindura imiterere y'ibikoresho bya semiconductor. Uyu muco ukoreshwa mu gukora ibikoresho bya semiconductor bifite imirimo itandukanye binyuze mu gukoresha doping. Nyamara, uyu muco utera imbogamizi kuri semiconductor‑Igerageza ryo gukoresha ibikoresho. Ibikoresho bya shimi, ibikoresho byo gutunganya n'amazi meza byose bishobora gukora nk'isoko ry'umwanda wangiza. Ndetse n'udupira tw'imiti twa semiconductor twangiza cyane tuzahura n'umwanda ugaragara nyuma yo kumara igihe kinini tugiye mu mwuka uri mu kirere. Gusukura imiti bikuraho umwanda wangiza kandi bigakomeza kubungabunga silicon isukuye.‑ubuso bw'umugati.
1.2 Ingano y'isukura ry'imiti
Gusukura imiti bigizwe ahanini n'ibyiciro bitatu:
Gusukura silikoni‑ubuso bw'umugati;
Gusukura ibikoresho by'icyuma (urugero: uduce twa tungsten two gukoresha electrodes zikoresha umwuka, impapuro za molybdenum zo gushyigikira umwuka, aloyide za aluminiyumu zo gukoresha umwuka, chromium yo gukoresha chromium‑gukora udupfukamunwa);
Gusukura ibikoresho n'ibikoresho (urugero: udukoresho tw'icyuma, imiyoboro ya quartz, ibikoresho by'ikirahure, ibumba rya grafiti, ibikoresho bya pulasitiki n'ibya kabutike).
1.3 Ubwoko bw'umwanda uterwa na Silicon‑Ubuso bw'amacupa
(1) Molekulike‑Ubwoko bw'umwanda
Molekile isanzwe‑bikora ibintu bihumanya byinjijwe kuri silikoni‑Ubuso bw'umugati burimo amavuta asanzwe cyangwa akozwe mu buryo bwa sintetike, resins n'amavuta. Imyanda iboneka mu gihe cyo gukata, gusya no gusiga irangi ahanini iri muri iki cyiciro. Andi masoko arimo ibikumwe by'intoki, ibisigazwa bya photoresist n'ibisigaye by'umwimerere.‑ibisigazwa by'ibinyabutabire.
Molekulike‑imyanda yo mu bwoko bwa silicon ikunze kwinjizwa mu mubiri‑Ubuso bwa wafer buterwa n'amashanyarazi. Molekuli z'amavuta, resins n'amavuta muri rusange ntabwo‑polar. Guhuza ibintu bituruka ku gukururana hagati ya molekile z’umwanda zitagira aho zibogamiye n’imbaraga zisigaye za atome za silikoni zo ku buso. Uku guhuza ibintu bingana n’imbaraga za van der Waals mu molekile ziri mu ma kristu. Izo mbaraga zikurura abantu ziba nke cyane kandi zibora vuba uko intera iri hagati ya molekile yiyongera. Intera ikora neza ni hafi 2‑3×10⁻⁸cm (2)‑3 Å), igereranywa n'umurambararo wa molekile. Bityo molekile‑imyanda ishobora gukurwaho mu buryo bworoshye ugereranije.
Ikindi kintu cy'ingenzi kiranga ni uko molekile nyinshi‑ubwoko bw'ibintu bihumanya ni amazi‑Ibinyabutabire bidashobora gushonga. Kubikuramo bituma silicon‑ahantu hameze nk'umugati hadakoreshwa amazi cyangwa aside, ibyo bikaba bibangamira imikoranire myiza hagati y'amazi yakuwemo ioyine‑imiti ya alkali n'ubuso bwa wafer. Ibi birinda reagents gukorana n'uduce tw'ubuso kandi bikabuza isuku nziza ya shimi.
(2) Iyonike‑Ubwoko bw'umwanda
Iyoni isanzwe‑kora imyanda iterwa na silikoni‑ubuso bwa wafer burimo K⁺, Na⁺, Ca²⁺, Mg²⁺, Fe²⁺, H⁺, OH⁻, F⁻, Cl⁻, S²⁻, CO₃²⁻n'ibindi. Iyi myanda ituruka ahantu hatandukanye: umwuka wo mu kirere, ibikoresho n'ibikoresho, imiti ikoreshwa mu kuvura,‑amazi meza adafite ioyine, amazi yo mu robine, umwuka usohoka n'ibyuya by'umukozi.
Ionic‑Uburyo bwo kunyuzamo amazi ahanini bukoreshwa mu kunyuzamo amazi. Ayoni y'umwanda ahuzwa n'ubuso bwa wafer binyuze mu buvuzi‑imbaraga z'ubuhuza. Intera iri hagati ya iyoni z'umwanda na atome zo hejuru ni ngufi cyane, ku buryo iyoni zirimo amazi zishobora gufatwa nk'igice cya lattice ya silikoni. Imyanda ya iyoni ikomoka kuri chemisorbed ishobora gukora nk'ahantu ho gufata: imwe ifata electron za lattice zidafite ubwisanzure kandi igakora nk'abakira; indi ifata imyobo idafite ubwisanzure kandi igakora nk'abatanga. Kubera imbaraga zikomeye za chemisorption, gukuraho imyanda ya iyoni biragoye cyane kuruta gukuraho imyanda ya molekile.
(3) Atomu‑Ubwoko bw'umwanda
Atomu‑Imyandu yo ku buso bw'ibintu ni atome z'icyuma nka zahabu, ifeza, umuringa, icyuma na nikeli. Izi atome z'icyuma akenshi zikomoka ku mihindagurikire igabanya ubukana bw'ibintu bihumanya ikirere, bigashyirwa kuri silikoni.‑ubuso bw'umugati.
Atomu‑Uburyo bwo guterwa n'ibiyobyabwenge bugaragaza imbaraga zikomeye zo gufatanya kandi biragoye kubikuraho.‑atome z'icyuma nka zahabu na platine ntizikorana cyane na aside na alkali bisanzwe. Bityo rero, ibikoresho byihariye nka aqua regia birakenewe kugira ngo habeho ibintu bishongesha. Ubwoko bw'icyuma buvanze buhita bugezwaho amazi menshi.‑amazi meza adasukuye.
1.4 Silicon rusange‑Uburyo bwo gusukura wafer
Nkuko byasesenguwe haruguru, molekile‑Imyanda yo mu bwoko bwa molekile biroroshye kuyikuraho. Imyandu isigaye ishobora gupfuka ionic‑na atome‑ubwoko bw'imyanda no kuyibuza kuyikuramo. Bityo, imyanda ya molekile igomba kubanza gukurwaho burundu mu gihe cya silikoni‑gusukura imiti ya wafer.
Ionic‑na atome‑Imyanda iterwa na shimi ifite ubushobozi bukomeye bwo kuzura. Imyanda ya atomike ikunze kuboneka mu rugero ruto kandi ntishobora gushonga kuri aside na alkali bisanzwe; ishobora gushonga gusa hakoreshejwe aqua regia cyangwa hydrogen aside‑ibisubizo bya peroxide. Aqua regia na peroxide ya hydrogen aside nabyo bishongesha imyanda ya iyoni. Uburyo busanzwe bwo gukora bukoresha aside‑imiti ya alkali cyangwa peroxide ya alkali ya hydrogen kugira ngo banze gukuraho imyanda ya ioni. Ibisigazwa by'imyanda ya ioni n'imyanda ya atome bikurwaho hakoreshejwe aqua regia cyangwa peroxide ya aside ya hydrogen. Gusukura bwa nyuma hakoreshejwe hydrogène nyinshi‑amazi meza asukuye arangiza igikorwa.
Muri make, silicon rusange‑Uburyo bwo gusukura wafer ni ubu: Gukuraho amavuta→Gukuraho iyoni→Atomu‑gukuraho umwanda→Yakuweho‑gukaraba mu mazi.
Udupira twa silikoni tugomba gusukurwa hakoreshejwe imiti mbere ya buri gikorwa. Nyamara, imiterere y'ubuso iratandukanye bitewe n'uko dukorwa. Ibikoresho byo gusukura n'intego z'ibanze biratandukanye hakurikijwe uko bigenda. Imikorere yo gusukura irahinduka. Uburyo n'intambwe zifatika bigomba kugenwa ku rubanza‑by‑ishingiro ry'urubanza hakurikijwe isuku nyayo‑ibisabwa ku ngaruka.
1.5 Uburyo bwo gusukura ibyuma bisanzwe n'ibikoresho
Ibikoresho by'icyuma n'ibikoresho byo muri laboratwari ni isoko ikomeye ya silikoni‑Kwanduza wafer. Gusukura neza ibyuma n'ibikoresho ni itegeko kugira ngo wafer ibe yanduye‑Isuku yo ku buso. Ihame rusange ryo gusukura ibyuma n'ibikoresho ni: kubanza gukuraho amavuta yanduye; gukata cyangwa gukaraba ukoresheje aside, alkali, amazi yo koza cyangwa aqua regia; hanyuma urangiza woge neza ukoresheje amavuta menshi.‑amazi meza adasukuye.
2 Ubumenyi bw'umutekano
Ubushakashatsi bukunze gukoresha imiti n'imyuka itandukanye, harimo aside ishobora gushya, iturika, uburozi n'iy'uburozi‑Ibintu birimo alkali. Gukoresha nabi bishobora gutera impanuka. Ingamba zo kwirinda zigomba gushyirwa imbere. Iyo habaye impanuka, komeza gutuza kandi ushyire mu bikorwa ingamba zikwiye zo gukosora vuba.
2.1 Gukoresha neza imiti ihumanya ikirere
Ibintu bisanzwe biva mu binyabutabire birimo toluene, acetone, ethanol, methyl ethyl ketone, trichloroethylene na tetrachloride ya karuboni. Ibintu byinshi biva mu binyabutabire bishobora gushya kandi bigashya iyo bishyushye cyane.‑imiterere y'ubushyuhe cyangwa hafi y'umuriro ufunguye. Bibike ahantu hakonje kure y'aho umuriro uturuka. Ntugashyushye ibikoresho by'umushongi ku ziko ry'amashanyarazi; amazi‑Gushyushya ubwogero ni byo byiza iyo bikenewe gushyushya. Mu gihe habaye inkongi, zimya umuriro ukoresheje igitambaro gitose, umusenyi muto, karuboni‑ibizimyamwoto bya dioxyde, karuboni‑kizimyamwoto cya tetrachloride cyangwa ifuro. Ntukigere ushyiramo amazi cyangwa amazi‑aside ishingiye ku‑ibikoresho byo kuzimya alkali.
Ibintu bisukura by’umwimerere birahindagurika kandi bifite uburozi butandukanye. Ibikorwa byose bigomba gukorerwa mu byuma bifunze umwuka uhagije.
2.2 Uburyo bwo gucunga neza aside na alkali
Igerageza rikoresha imbaraga‑aside nka aside sulfurike, aside nitrike, aside hydrochloric, aside hydrofluoric na aqua regia, ndetse n'ingufu zikomeye‑imiti ya alkali irimo sodiyumu hidroksidi na potasiyumu hidroksidi. Ibi bintu byangiza cyane uruhu rw'umuntu n'imyenda, bisaba kugenzura neza umutekano w'imikorere.
Shyiraho uburyo bwiza bwo guhumeka no gusohora imyuka mu bice bishobora kwirundanyamo umwuka ukomoka kuri aside cyangwa alkali.
Abakoresha bagomba kwambara ibikoresho byo kwirinda byabugenewe nk'uturindantoki twa rubber n'udukoresho two guhumeka.
Ntuzigere unywa umuti wa aside cyangwa alkali ukoresheje pipette; koresha pipettes zirimo utubumbe twa rubber.
Witondere mu gihe cyo gutwara kugira ngo wirinde ko amacupa agwa cyangwa ngo ameneke. Jya ushyira imiyoboro y'amacupa kure y'abakozi mu gihe ufungura amacupa.
Shyiramo aside sulfurike buhoro buhoro mu mazi kugira ngo bivange. Ntuzigere usuka amazi muri aside sulfurike ikomeye.
Mbere yo kugabanya ubushyuhe, shyiramo aside cyangwa alkali nyinshi mu mazi, hanyuma ukoreshe aside cyangwa aside bihuye.
Imiyoboro irimo ubusa yari isanzwe irimo aside cyangwa alkali nyinshi igomba gukurwamo amazi yose, igasukwaho amazi kenshi, hanyuma igakorerwa isuku isanzwe.
Mu gihe aside ibaye‑Gutwika kwa alkali, oza ingirangingo zangiritse n'amazi menshi atemba ako kanya. Iyo amazi yamenetse mu maso, hira amaso vuba ukoresheje amazi menshi yo mu robine. Shaka ubufasha bwihuse nyuma yo koza, hatitawe ku bushyuhe cyangwa ku ruhu rw'amaso.
2.3 Gukoresha neza imyuka
Imyuka yo mu igerageza itangwa binyuze mu‑Silindari z'umuvuduko cyangwa imiyoboro ya gaze. Kuvanga imyuka imwe n'imwe bishobora gutera gushya cyangwa guturika.
Silindari za gazi zifite ibara‑byanditseho kandi binashyirwaho ikimenyetso kugira ngo bigaragaze imyuka irimo. Silindari zibika gazi ku muvuduko mwinshi; silindari nshya zuzuye zigera kuri 150 kg/cm². Hakurikizwa ingamba zihariye zo kwirinda mu gihe cyo kubika no gukoresha.
Irinde ko imirasire ya gaze ihura n'izuba ryinshi mu mpeshyi. Bika ibikoresho bishya n'ibikoresho bikoresha umuriro kure ya mirasire.‑ahantu ho kubika ibintu.
Bika imyuka ibiri ikora mu buryo butwika cyangwa bugaturika iyo ikozeho (urugero: silindiri za hydrogen na ogisijeni) mu byumba bitandukanye kugira ngo hirindwe impanuka ziterwa no kuva kw'imyuka.
Ntugacukure umwuka wa silindiri burundu; komeza umuvuduko runaka usigaye muri silindiri.
Irinde kwanduza amavuta ku mavali ya silindiri n'udupfunyika.
Mu gihe ukoresha hydrogen, kuraho umwuka mu bikoresho ukoresheje gazi idafite umwuka, genzura sisitemu yose niba idafite amazi, hanyuma ushyireho ibikoresho bihagarika umwuka.
2.4 Uburyo bwo gucunga ibintu byangiza mu buryo bwizewe
Irinde uburozi mu gihe ukoresha imiti n'ibindi binyabutabire byangiza mu igerageza. Amahame y'ingenzi y'umutekano ni aya akurikira:
Kora ibikorwa biri mu byuma bitwikiriye imyotsi. Sukura imyanda n'ibisigazwa by'imyanda mbere yo kubijugunya ahantu habigenewe hatekanye.
Ambara uturindantoki two guhumeka n'uturindantoki. Irinde ko uruhu rwakwangiza cyangwa ngo unywe ibintu byangiza mu kanwa uko byagenda kose.
Sukura uturindantoki neza n'amazi mbere yo kuzikuramo nyuma yo kurangiza igerageza.
Igihe cyo kohereza: 30 Nyakanga-2026