Hauv semiconductor-Hauv kev sim cov txheej txheem ntawm cov khoom siv, kev ntxuav tshuaj lom neeg yog hais txog kev tshem tawm ntau yam tsis huv lossis cov roj uas muaj kuab paug uas nqus tau rau ntawm cov nplaim ntawm cov khoom siv semiconductor, cov khoom siv hlau thiab cov khoom siv hauv chaw kuaj mob. Kev ntxuav siv cov tshuaj reagents thiab cov kuab tshuaj organic los ua rau muaj kev tshuaj lom neeg thiab cov teebmeem yaj nrog cov tsis huv thiab cov roj uas nqus tau rau ntawm cov nplaim ntawm cov khoom ua haujlwm. Kev ntsuas lub cev xws li kev siv ultrasonication, cua sov thiab lub tshuab nqus tsev kuj tseem siv tau los tshem tawm cov tsis huv ntawm cov nplaim ntawm cov khoom ua haujlwm. Tom qab ntawd cov khoom ua haujlwm raug ntxuav nrog cov khoom loj ntawm cov khoom siab.-kev dawb huv kub-thiab-dej txias deionized kom tau txais cov chaw huv.
1.1 Qhov Tseem Ceeb ntawm Kev Ntxuav Tshuaj
Kev ntxuav tshuaj lom neeg yog qhov yuav tsum tau ua rau txhua qhov kev sim hauv kev sim txheej txheem. Qhov zoo ntawm kev ntxuav tshuaj lom neeg muaj feem cuam tshuam loj heev rau cov txiaj ntsig ntawm kev sim. Kev ntxuav tsis raug yuav ua rau tsis ua tiav lossis tsis zoo-Cov txiaj ntsig zoo ntawm kev sim. Yog li ntawd, kev nkag siab txog cov haujlwm thiab cov ntsiab cai ntawm kev ntxuav tshuaj yog qhov tseem ceeb rau kev sim ua tiav.
Raws li paub zoo, ib qho tseem ceeb ntawm cov khoom siv semiconductor yog lawv qhov rhiab heev rau cov khoom tsis huv. Txawm tias cov khoom tsis huv ntawm qhov chaw-ib qho-lab theem tuaj yeem hloov pauv cov khoom siv lub cev ntawm cov semiconductors. Cov khoom no yog siv los tsim cov khoom siv semiconductor nrog ntau yam haujlwm los ntawm kev doping. Txawm li cas los xij, tib yam khoom no tsim cov teeb meem rau semiconductor-kev sim ua cov txheej txheem ntawm cov khoom siv. Cov tshuaj reagents, cov cuab yeej ua haujlwm thiab dej ntxuav tuaj yeem ua rau muaj kev ua qias tuaj yeem ua rau muaj kev ua qias tuaj yeem ua rau muaj kev puas tsuaj. Txawm tias cov wafers semiconductor pristine yuav raug kev puas tsuaj pom tseeb tom qab raug huab cua ib puag ncig ntev. Kev ntxuav tshuaj tshem tawm cov kev ua qias tuaj yeem ua rau muaj kev puas tsuaj thiab tswj cov silicon huv.-cov nto wafer.
1.2 Qhov Kev Siv Tshuaj Ntxuav
Kev ntxuav tshuaj feem ntau suav nrog peb pawg:
Kev ntxuav silicon-cov nto wafer;
Kev ntxuav cov khoom siv hlau (piv txwv li, tungsten filaments rau cov electrodes evaporation, molybdenum sheets rau cov evaporation supports, aluminium alloys rau cov evaporation sources, chromium rau chromium-kev tsim lub ntsej muag);
Kev ntxuav cov cuab yeej thiab cov hlab (piv txwv li, cov tweezers hlau, cov raj quartz, cov thawv iav, cov pwm graphite, cov khoom yas thiab roj hmab).
1.3 Hom Kev Ua Phem Rau Silicon-Cov Nto Wafer
(1) Cov tshuaj molecular-Hom Kev Tawm Tsam Tsis Zoo
Cov qauv molecular ib txwm muaj-tsim cov kuab paug uas nqus tau rau ntawm silicon-Cov nplaim wafer muaj xws li cov roj ntuj lossis cov roj ua los ntawm cov khoom siv, cov resins thiab cov roj. Cov khoom tsis huv uas tau tsim thaum lub sijhawm txiav, sib tsoo thiab polishing feem ntau poob rau hauv pawg no. Lwm qhov chaw suav nrog cov cim ntiv tes, cov khoom seem photoresist thiab cov organic seem.-cov kuab tshuaj deposits.
Molecular-hom impurities feem ntau yog lub cev adsorbed thiab khi rau silicon-cov nplaim wafer los ntawm kev nyiam electrostatic. Cov roj ntawm cov roj, cov resins thiab cov roj feem ntau tsis yog-polar. Kev sib txuas tshwm sim los ntawm kev sib txuas ntawm cov molecule impurity nruab nrab thiab cov zog seem tsis txaus siab ntawm cov silicon atoms saum npoo av. Qhov kev sib cuam tshuam no sib npaug rau cov zog van der Waals ntawm cov molecule hauv cov molecular crystals. Cov zog nyiam no tsis muaj zog thiab lwj sai sai nrog kev nce ntxiv ntawm qhov deb ntawm intermolecular. Qhov ntau ntawm kev sib cuam tshuam zoo yog kwv yees li 2-3×10⁻⁸cm (2-3 Å), piv rau cov kab uas hla ntawm cov molecular. Yog li ntawd, molecular-hom impurities tuaj yeem raug tshem tawm yooj yim.
Lwm qhov tseem ceeb ntawm cov tshuaj no yog tias nws cov molecular feem ntau yog-cov tshuaj lom neeg yog dej-cov organic sib xyaw uas tsis yaj tau. Lawv cov adsorption ua rau silicon-Cov nplaim wafer hydrophobic, uas cuam tshuam kev sib cuag zoo ntawm cov dej deionised / acid-Cov kua alkali thiab cov nplaim wafer. Qhov no tiv thaiv cov reagents los ntawm kev sib cuam tshuam nrog cov khoom me me ntawm qhov chaw thiab tiv thaiv kev ntxuav tshuaj zoo.
(2) Ionic-Hom Kev Tawm Tsam Tsis Zoo
Cov ion sib xws-tsim cov impurities adsorbed rau ntawm silicon-Cov nplaim wafer suav nrog K⁺, Na⁺, Ca²⁺, Mg²⁺, Fe²⁺, H⁺, OH⁻, F⁻, Cl⁻, S²⁻, CO₃²⁻thiab lwm yam. Cov khoom tsis huv no los ntawm ntau qhov chaw sib txawv: huab cua ib puag ncig, cov khoom siv thiab cov khoom siv, cov tshuaj lom neeg, qis-dej ntshiab deionized, dej kais, ua pa tawm thiab cov hws ntawm tus neeg teb xov tooj.
Ionic-hom adsorption feem ntau yog los ntawm chemisorption. Cov ions impurity sib txuas rau cov nplaim wafer los ntawm cov tshuaj lom neeg-cov zog sib txuas. Qhov sib npaug ntawm cov ions tsis huv thiab cov atoms saum npoo av luv heev, xws li cov ions adsorbed yuav raug suav hais tias yog ib feem ntawm silicon lattice. Chemisorbed ionic impurities tuaj yeem ua haujlwm ua qhov chaw ntes: qee qhov khi cov electrons lattice dawb thiab ua haujlwm ua cov neeg txais; lwm tus ntes cov qhov dawb thiab ua haujlwm ua cov neeg pub dawb. Vim muaj zog chemisorption, tshem tawm cov ionic impurities nyuaj dua li tshem tawm cov molecular contaminations.
(3) Lub zog atom-Hom Kev Tawm Tsam Tsis Zoo
Atomic-cov khoom ua qias tuaj ntawm saum npoo av feem ntau yog cov hlau xws li kub, nyiaj, tooj liab, hlau thiab nickel. Cov hlau atoms no feem ntau yog tsim los ntawm cov tshuaj tiv thaiv kev hloov pauv hauv cov kua qaub, tso rau ntawm silicon.-cov nto wafer.
Atomic-hom adsorption qhia txog lub zog khi muaj zog tshaj plaws thiab nyuaj tshaj plaws rau tshem tawm. Hnyav-Cov hlau atoms xws li kub thiab platinum tsis tshua muaj kev sib xyaw nrog cov kua qaub thiab alkalis ib txwm muaj. Yog li ntawd, cov tshuaj reagents tshwj xeeb xws li aqua regia yuav tsum tau tsim cov tshuaj sib xyaw ua ke. Cov hlau sib xyaw ua ke tom qab ntawd raug ntxuav tawm nrog cov tshuaj siab.-dej deionized purity.
1.4 Cov Silicon Dav Dav-Cov Txheej Txheem Ntxuav Wafer
Raws li tau soj ntsuam saum toj no, molecular-cov khoom tsis huv uas zoo li no yooj yim tshem tawm. Cov khoom tsis huv uas tseem tshuav tuaj yeem npog cov ionic-thiab atomic-hom impurities thiab thaiv lawv txoj kev tshem tawm. Yog li ntawd, cov molecular contaminations yuav tsum tau tshem tawm tag nrho ua ntej thaum lub sijhawm silicon-kev ntxuav tshuaj wafer.
Ionic-thiab atomic-Cov khoom tsis huv uas muaj cov tshuaj lom neeg raug nqus nrog lub zog sib txuas ntawm qhov chaw. Cov khoom tsis huv atomic feem ntau muaj nyob rau hauv cov khoom me me thiab tsis cuam tshuam rau cov kua qaub thiab alkalis; lawv tsuas yog tuaj yeem yaj los ntawm aqua regia lossis acidic hydrogen.-cov tshuaj peroxide. Aqua regia thiab acidic hydrogen peroxide kuj yaj cov ionic impurities. Cov txheej txheem ua haujlwm txheem siv cov kua qaub-cov tshuaj alkali lossis alkaline hydrogen peroxide kom tshem tawm cov ionic impurities ua ntej. Cov ionic contaminations thiab atomic impurities seem ces raug tshem tawm siv aqua regia lossis acidic hydrogen peroxide. Kev yaug zaum kawg nrog high-dej ntshiab deionised ua tiav cov txheej txheem.
Hauv kev xaus, cov silicon dav dav-Kev ntxuav wafer yog: Degreasing→Kev tshem tawm cov ion→Atomic-kev tshem tawm cov khoom tsis huv→Deionized-kev ntxuav dej.
Cov silicon wafers yuav tsum tau ntxuav cov tshuaj ua ntej txhua qhov kev sim. Txawm li cas los xij, cov xwm txheej ntawm qhov chaw sib txawv ntawm kev khiav mus rau kev khiav. Yog li ntawd, cov tshuaj ntxuav thiab cov hom phiaj tseem ceeb sib txawv raws li. Cov txheej txheem ntxuav tes ua tau yooj yim. Cov txheej txheem thiab cov kauj ruam yuav tsum tau txiav txim siab rau ib rooj plaub.-by-raws li qhov xwm txheej raws li kev ntxuav tiag tiag-cov kev cai ntawm cov nyhuv.
1.5 Kev Ntxuav Cov Hlau thiab Cov Khoom Siv Ua Noj
Cov ntaub ntawv hlau thiab cov cuab yeej siv hauv chaw kuaj mob yog cov khoom siv tseem ceeb ntawm silicon-Kev ua qias tuaj ntawm cov wafer. Kev ntxuav cov hlau thiab cov khoom siv kom huv si yog qhov yuav tsum tau ua kom ntseeg tau tias cov wafer-Kev ntxuav nto. Lub hauv paus ntsiab lus dav dav rau cov hlau thiab cov khoom siv yog: tshem tawm cov roj av ua ntej; ua etching lossis ntxuav nrog cov kua qaub, alkalis, cov tshuaj ntxuav lossis aqua regia; thiab ua tiav los ntawm kev yaug kom huv si nrog siab-dej deionized purity.
2 Kev Paub Txog Kev Nyab Xeeb
Cov kev sim feem ntau siv ntau yam tshuaj lom neeg thiab roj, suav nrog cov kua qaub uas yooj yim hlawv, tawg, lom thiab corrosive.-cov tshuaj alkali. Kev siv tsis raug yuav ua rau muaj xwm txheej. Yuav tsum tau ua tib zoo saib xyuas kev tiv thaiv. Yog tias muaj xwm txheej tshwm sim, nyob twj ywm thiab ua cov kev kho kom raug sai li sai tau.
2.1 Kev Siv Cov Tshuaj Organic Kom Muaj Kev Nyab Xeeb
Cov kuab tshuaj organic feem ntau muaj xws li toluene, acetone, ethanol, methyl ethyl ketone, trichloroethylene thiab carbon tetrachloride. Feem ntau cov kuab tshuaj organic yooj yim hlawv thiab kub hnyiab thaum kub heev.-kub lossis ze hluav taws qhib. Khaws cia rau qhov chaw txias kom deb ntawm cov khoom siv hluav taws xob. Tsis txhob ua kom cov thawv tshuaj yaj kub ncaj qha rau ntawm cov qhov cub hluav taws xob; dej-Qhov zoo tshaj yog siv cua sov rau hauv da dej thaum xav tau cua sov. Yog tias muaj hluav taws kub, tua cov nplaim taws nrog daim ntaub ntub dej, xuab zeb me me, thiab cov pa roj carbon.-cov tshuaj tua hluav taws dioxide, carbon-Cov tshuaj tua hluav taws tetrachloride lossis cov tshuaj tua hluav taws ua npuas ncauj. Tsis txhob siv dej los yog dej-kua qaub raws li-cov neeg sawv cev tua alkali.
Cov kuab tshuaj organic yog cov uas yaj tau yooj yim thiab muaj ntau qib kev lom. Txhua yam kev ua haujlwm yuav tsum tau ua hauv cov qhov tso pa tawm uas muaj cua nkag tau zoo.
2.2 Kev Tswj Xyuas Cov Acids thiab Alkalis Kom Muaj Kev Nyab Xeeb
Cov kev sim siv cov khoom siv muaj zog-cov kua qaub xws li sulfuric acid, nitric acid, hydrochloric acid, hydrofluoric acid thiab aqua regia, nrog rau cov muaj zog-cov tshuaj alkali suav nrog sodium hydroxide thiab potassium hydroxide. Cov tshuaj no ua rau tawv nqaij thiab khaub ncaws puas tsuaj heev, xav tau kev tswj hwm kev nyab xeeb thaum ua haujlwm.
Nruab cov tshuab cua thiab cov tshuab tso pa tawm zoo hauv cov chaw uas cov pa roj acid lossis alkali yuav sib sau ua ke.
Cov neeg ua haujlwm yuav tsum hnav cov khoom siv tiv thaiv zoo xws li hnab looj tes roj hmab thiab cov ntaub thaiv pa.
Tsis txhob muab cov kua qaub los yog alkali tso rau hauv qhov ncauj; siv cov pipettes uas muaj cov roj hmab.
Ua tib zoo saib xyuas thaum thauj mus los kom tiv thaiv kom lub raj mis tsis txhob ntxeev lossis tawg. Taw tes qhov qhib ntawm lub raj mis kom deb ntawm cov neeg ua haujlwm thaum qhib cov thawv.
Maj mam ntxiv cov kua qaub sulfuric rau hauv dej kom yaj. Tsis txhob nchuav dej rau hauv cov kua qaub sulfuric uas muaj concentrated.
Ua ntej yuav tsum tau neutralization, dilute cov concentrated acids lossis alkalis nrog dej, tom qab ntawd ua neutralization siv cov alkali lossis acid solutions.
Cov thoob khib nyiab uas tau khaws cov kua qaub lossis cov alkalis uas tau muaj cov kua qaub ntau dhau yuav tsum tau muab nchuav pov tseg tag, yaug nrog dej ntau zaus, thiab tom qab ntawd ua raws li cov txheej txheem ntxuav niaj hnub.
Yog tias muaj kua qaub-Yog tias kub hnyiab los ntawm alkali, yaug cov nqaij uas raug mob nrog dej ntws ntau tam sim ntawd. Yog tias cov dej txaws nkag rau hauv qhov muag, yaug qhov muag sai sai nrog dej ntau ntawm cov kais. Nrhiav kev kho mob tam sim ntawd tom qab yaug, tsis hais qhov kub hnyiab hnyav npaum li cas lossis raug rau qhov muag.
2.3 Kev Siv Cov Roj Av Kom Muaj Kev Nyab Xeeb
Cov pa roj sim tau muab los ntawm kev kub siab-cov thooj voos kheej kheej lossis cov kav dej roj. Kev sib xyaw qee cov pa roj yuav ua rau muaj kev kub hnyiab lossis tawg.
Cov thoob roj muaj xim-tau sau code thiab muab daim ntawv lo rau kom paub cov pa roj uas muaj nyob hauv. Cov thooj voos kheej kheej tuav cov pa roj ntawm qhov siab siab; cov thooj voos kheej kheej tshiab uas tau ntim puv txog li 150 kg/cm2²Muaj kev ceev faj tshwj xeeb thaum lub sijhawm khaws cia thiab siv.
Tsis txhob cia cov thoob roj raug tshav ntuj ncaj qha rau lub caij ntuj sov. Khaws cov khoom siv hluav taws xob thiab cov khoom siv hluav taws xob kom deb ntawm lub thoob.-thaj chaw cia khoom.
Khaws cov khub roj uas ua rau kub hnyiab lossis tawg thaum sib cuag (piv txwv li cov thoob roj hydrogen thiab cov thoob roj oxygen) rau hauv cov chav sib cais kom tsis txhob muaj xwm txheej tshwm sim los ntawm kev xau roj.
Tsis txhob tso cov pa roj tawm tag nrho; khaws qee qhov siab seem hauv cov thooj voos kheej kheej.
Tiv thaiv kom tsis txhob muaj roj ntau dhau rau ntawm lub tog raj kheej lub qhov (valves) thiab cov qhov ntswj (wrenches).
Thaum siv hydrogen, lim cua tawm ntawm cov khoom siv nrog cov roj inert, tshuaj xyuas tag nrho lub kaw lus kom paub seb puas muaj qhov xau, thiab teeb tsa cov khoom ntes flashback.
2.4 Kev Siv Cov Tshuaj Lom Kom Muaj Kev Nyab Xeeb
Tiv thaiv kev lom thaum ua haujlwm nrog cov tshuaj lom neeg thiab cov tshuaj sib xyaw hauv kev sim. Cov ntsiab cai tseem ceeb ntawm kev nyab xeeb yog raws li nram no:
Ua haujlwm sab hauv cov qhov tso pa phem. Kho cov khib nyiab thiab cov kua dej khib nyiab ua ntej pov tseg rau ntawm qhov chaw nyab xeeb.
Hnav cov khoom siv ua pa thiab hnab looj tes tiv thaiv. Tsis txhob kov daim tawv nqaij thiab noj cov khoom lom hauv qhov ncauj.
Yaug cov hnab looj tes kom huv si nrog dej ua ntej tshem lawv tom qab ua tiav kev sim.
Lub sijhawm tshaj tawm: Lub Xya Hli-30-2026