Ku-semiconductor‑Ukuhlolwa kwenqubo yedivayisi, ukuhlanza ngamakhemikhali kubhekisela ekususweni kokungcola okuhlukahlukene okuyingozi noma ukungcola kwamafutha okufakwe ebusweni be-semiconductors, izinto zensimbi kanye nezitsha zelebhu. Ukuhlanza kusebenzisa ama-reagents amakhemikhali kanye nezinyibilikisi eziphilayo ukuze kubangele ukusabela kwamakhemikhali kanye nemiphumela yokuncibilika ngokungcola kanye nokungcola kwamafutha okufakwe ebusweni bezinto zokusebenza. Izindlela zomzimba ezifana ne-ultrasonication, ukushisa kanye nokupompa nge-vacuum nazo zingasetshenziswa ukususa ukungcola ezindaweni zokusebenza. Izinto zokusebenza zibe sezihlanzwa ngobuningi obukhulu bamanzi aphezulu.‑ubumsulwa bushisa‑futhi‑amanzi abandayo ahlanjululwe ukuze kutholakale izindawo ezihlanzekile.
1.1 Ukubaluleka Kokuhlanza Amakhemikhali
Ukuhlanzwa kwamakhemikhali kuyadingeka kukho konke ukuhlolwa kokuhlolwa kwenqubo. Ikhwalithi yokuhlanzwa kwamakhemikhali inethonya elibalulekile emiphumeleni yokuhlola. Ukuhlanzwa okungalungile kungaholela ekuhlulekeni noma ekungalungini‑imiphumela yokuhlola esezingeni eliphezulu. Ngakho-ke, ukuqonda imisebenzi nezimiso zokuhlanza amakhemikhali kubalulekile ukuze kuphumelele ukuhlolwa kwenqubo.
Njengoba kwaziwa kahle, isici esiyinhloko sama-semiconductor ukuzwela kwawo okuphezulu kokungcola. Ngisho nokulandelela ukungcola ezingxenyeni‑nge‑izinga lezigidi lingashintsha izakhiwo zomzimba zama-semiconductor. Lesi sici sisetshenziselwa ukwakha amadivayisi e-semiconductor anemisebenzi eyahlukahlukene ngokusebenzisa i-doping. Noma kunjalo, lesi sici esifanayo sidala izinselele kuma-semiconductor‑Ukuhlolwa kwenqubo yedivayisi. Ama-reagent amakhemikhali, amathuluzi okucubungula kanye namanzi okuhlanza konke kungasebenza njengemithombo yokungcola okuyingozi. Ngisho nama-wafer e-semiconductor ahlanzekile azothola ukungcola okubonakalayo ngemva kokuchayeka isikhathi eside emoyeni ozungezile. Ukuhlanza amakhemikhali kususa ukungcola okuyingozi futhi kugcina i-silicon ihlanzekile‑izindawo ze-wafer.
1.2 Ububanzi Bokuhlanza Amakhemikhali
Ukuhlanza ngamakhemikhali kuhlanganisa ikakhulukazi izigaba ezintathu:
Ukuhlanzwa kwe-silicon‑izindawo ze-wafer;
Ukuhlanzwa kwezinto zensimbi (isb., imicu ye-tungsten yama-electrode okuhwamuka, amashidi e-molybdenum okusekela ukuhwamuka, ama-alloy e-aluminium emithonjeni yokuhwamuka, i-chromium ye-chromium‑ukwenziwa kwemaski);
Ukuhlanzwa kwamathuluzi nezitsha (isib., ama-tweezers ensimbi, amashubhu e-quartz, izitsha zengilazi, isikhunta se-graphite, imikhiqizo yepulasitiki neyerabha).
1.3 Izinhlobo Zokungcola Okungcolile Ku-Silicon‑Izindawo ze-Wafer
(1) Ama-molecule‑Uhlobo Lokungcola Ukumuncwa
Ama-molecule ajwayelekile‑yakha ukungcola okufakwe ku-silicon‑Izindawo ze-wafer zifaka amafutha emvelo noma okwenziwa, ama-resin namafutha. Ukungcola okufakwa ngesikhathi sokusika, ukugaya kanye nokupholisha i-substrate kuwela kakhulu kulesi sigaba. Eminye imithombo ifaka phakathi izigxivizo zeminwe, izinsalela ze-photoresist kanye nezinsalela zezinto eziphilayo‑amadiphozithi e-solvent.
Ama-molecule‑ukungcola kohlobo oluthile kugxishwa kakhulu ngokomzimba futhi kuboshwe ku-silicon‑Izindawo ze-wafer ezikhangwa yi-electrostatic. Ama-molecule amafutha, ama-resin namafutha ngokuvamile awayona‑i-polar. Ukuhlangana kuvela ekukhanganeni phakathi kwama-molecule angahlanzekile angathathi hlangothi kanye namandla asele anganelisekile ama-athomu e-silicon angaphezulu. Lokhu kusebenzisana kulingana namandla e-van der Waals phakathi kwama-molecule kuma-crystal ama-molecule. Amandla anjalo akhangayo abuthakathaka futhi abola ngokushesha ngebanga elikhulayo phakathi kwama-molecule. Ububanzi bokuxhumana obusebenzayo bungaba ngu-2‑3×10⁻⁸cm (2)‑3 Å), okuqhathaniswa nobubanzi bama-molecule. Ngakho-ke ama-molecule‑ukungcola kohlobo kungasuswa kalula uma kuqhathaniswa.
Esinye isici esiyinhloko ukuthi iningi lama-molecule‑uhlobo lwezinto ezingcolisayo ngamanzi‑amakhemikhali angaphiliyo e-organic. Ukumuncwa kwawo kwenza i-silicon‑izindawo ze-wafer ezimbozwe ngamanzi, okuvimbela ukuxhumana okuphumelelayo phakathi kwamanzi angenawo i-ionized/i-asidi‑izixazululo ze-alkali kanye nezindawo ze-wafer. Lokhu kuvimbela ama-reagent ukuthi asebenzisane nezinhlayiya zomhlaba futhi kuvimbela ukuhlanza amakhemikhali okuphumelelayo.
(2) i-Ionic‑Uhlobo Lokungcola Ukumuncwa
I-ion evamile‑yakha ukungcola okufakwe ku-silicon‑izindawo ze-wafer zifaka phakathi i-K⁺, Na⁺, Ca²⁺, Umphathi²⁺, Fe²⁺, H⁺, OH⁻, F⁻, Cl⁻, S²⁻, CO₃²⁻njalo njalo. Lokhu kungcola kuvela emithonjeni eyahlukahlukene: umoya ozungezile, izitsha kanye nemishini, izinto zamakhemikhali,‑amanzi ahlanzekile angenawo i-ion, amanzi ompompi, umoya ophumayo kanye nokujuluka komuntu osebenzayo.
I-Ionic‑uhlobo lokumuncwa ikakhulukazi lungolwe-chemisorption. Ama-ion okungcola anamathela ezindaweni ze-wafer ngamakhemikhali‑Amandla okubopha. Ibanga lokulingana phakathi kwama-ion okungcola nama-athomu angaphezulu lifushane kakhulu, kangangokuthi ama-ion afakwe emanzini angabhekwa njengengxenye ye-silicon lattice. Ukungcola kwe-ionic okufakwe e-chemisorbed kungasebenza njengezikhungo zokubamba: amanye abopha ama-electron e-lattice amahhala futhi asebenze njengabamukeli; amanye abamba izimbobo ezikhululekile futhi asebenze njengabanikeli. Ngenxa yamandla aqinile e-chemisorption, ukususa ukungcola kwe-ionic kunzima kakhulu kunokususa ukungcola kwama-molecule.
(3) I-Athomu‑Uhlobo Lokungcola Ukumuncwa
I-Atomic‑Izinto ezingcolisa ubuso ngokuyinhloko ama-athomu ensimbi njengegolide, isiliva, ithusi, insimbi kanye ne-nickel. Lawa ma-athomu ensimbi avame ukukhiqizwa ukusabela kokuguquguquka kokuguquguquka kuma-etchants ane-asidi, afakwa ku-silicon‑izindawo ze-wafer.
I-Atomic‑uhlobo lokumuncwa lubonisa amandla amakhulu okubopha futhi kunzima kakhulu ukukuqeda.‑ama-athomu ensimbi afana negolide neplatinum awasabeli kahle kuma-asidi nama-alkali ajwayelekile. Ngakho-ke ama-reagent akhethekile njenge-aqua regia ayadingeka ukuze kwakhiwe ama-complexes ancibilikayo. Izinhlobo zensimbi eziyinkimbinkimbi kamuva zigezwa ngamanzi aphezulu.‑amanzi ahlanzekile angenawo i-ion.
1.4 I-Silicon Ejwayelekile‑Inqubo Yokuhlanza I-Wafer
Njengoba kuhlaziywe ngenhla, ama-molecule‑ukungcola kohlobo oluthile kulula kakhulu ukukususa. Ukungcola okusele kwama-molecule kungasibekela i-ionic‑kanye ne-athomu‑thayipha ukungcola bese uvimba ukususwa kwako. Ngakho-ke, ukungcola kwama-molecule kumele kususwe ngokuphelele kuqala ngesikhathi se-silicon‑ukuhlanza amakhemikhali e-wafer.
I-Ionic‑kanye ne-athomu‑ukungcola kohlobo oluthile kuxutshwe ngamakhemikhali ngokuqina okukhulu kobuso. Ukungcola kwe-athomu kuvame ukuba khona ngobuningi obuphansi futhi kungangeni kuma-asidi avamile nama-alkali; kungancibilikiswa kuphela yi-aqua regia noma i-hydrogen ene-asidi‑izixazululo ze-peroxide. I-Aqua regia kanye ne-acidic hydrogen peroxide nakho kuncibilikisa ukungcola kwe-ionic. Indlela yokusebenza ejwayelekile isebenzisa i-acid‑izixazululo ze-alkali noma i-alkaline hydrogen peroxide ukuze kususwe ukungcola kwe-ionic kuqala. Ukungcola kwe-ionic okusele kanye nokungcola kwe-athomu kuyasuswa kusetshenziswa i-aqua regia noma i-acidic hydrogen peroxide. Ukuhlanza kokugcina nge-high‑amanzi ahlanzekile angenawo i-ion aqeda inqubo.
Ngamafuphi, i-silicon ejwayelekile‑Uchungechunge lokuhlanza i-wafer luthi: Ukususa amafutha→Ukususwa kwe-ion→I-Atomic‑ukususwa kokungcola→Isusiwe‑ukuhlanza ngamanzi.
Ama-wafer e-silicon kumele ahlanzwe ngamakhemikhali ngaphambi kokuhlolwa ngakunye. Noma kunjalo, izimo zobuso ziyahlukahluka kusukela ekuqhutshweni kuya ekuqhutshweni. Ngakho-ke, amakhemikhali okuhlanza kanye nezinhloso ezibalulekile ziyahlukahluka ngokufanele. Imisebenzi yokuhlanza engokoqobo iyaguquguquka. Izindlela nezinyathelo eziqondile kufanele zinqunywe ecaleni.‑by‑isisekelo secala ngokuya ngokuhlanzwa kwangempela‑izidingo zomphumela.
1.5 Ukwelashwa Kokuhlanza Kwezinsimbi Ezivamile Nezitsha
Izinto zensimbi namathuluzi elebhu ziyimithombo emikhulu ye-silicon‑ukungcoliswa kwe-wafer. Ukuhlanzwa kahle kwezinsimbi nezitsha kuyadingeka ukuqinisekisa i-wafer‑ukuhlanzeka kwendawo. Umgomo wokuhlanza ojwayelekile wezinsimbi nezitsha uthi: susa ukungcola kwamafutha kuqala; susa noma ugeze ngama-acid, ama-alkali, izixazululo zokugeza noma i-aqua regia; bese uqeda ngokuhlanza kahle nge-high‑amanzi ahlanzekile angenawo i-ion.
2 Ulwazi Lokuphepha
Ukuhlolwa kuvame ukusebenzisa amakhemikhali namagesi ahlukahlukene, okuhlanganisa i-asidi evuthayo, eqhumayo, enobuthi kanye ne-esidi ebolile‑izinto ze-alkali. Ukuphathwa kabi kungabangela izingozi. Izinyathelo zokuvimbela kufanele zibekwe phambili. Uma kwenzeka ingozi, hlala uzolile futhi usebenzise izinyathelo zokulungisa ezifanele ngokushesha.
2.1 Ukuphathwa Ngokuphephile Kwezinyibilikisi Zemvelo
Izinyibilikisi ezivamile zezinto eziphilayo zifaka phakathi i-toluene, i-acetone, i-ethanol, i-methyl ethyl ketone, i-trichloroethylene kanye ne-carbon tetrachloride. Izinyibilikisi eziningi zezinto eziphilayo ziyavutha futhi ziyavutha ngaphansi kokushisa okuphezulu.‑izimo zokushisa noma eduze kwamalangabi avulekile. Zigcine ezindaweni ezipholile kude nemithombo yokushisa. Ungafudumezi izitsha zokuhlanza ngqo ezitofini zikagesi; amanzi‑Ukushisa indlu yokugezela kuyathandwa uma kudingeka ukushisa. Uma kwenzeka umlilo, cisha amalangabi ngendwangu emanzi, isihlabathi esicolekile, ikhabhoni‑izicima-mlilo ze-dioxide, ikhabhoni‑izicima-mlilo ze-tetrachloride noma izicima-mlilo ze-foam. Ungalokothi ufake amanzi noma amanzi‑i-asidi esuselwe‑izinto zokucima i-alkali.
Izinyibilikisi eziphilayo ziyashintshashintsha futhi zinezinga elihlukahlukene lobuthi. Yonke imisebenzi kufanele yenziwe ngaphakathi kwezivalo zomlilo ezinomoya owanele.
2.2 Ukuphathwa Ngokuphephile Kwe-Acid Nama-Alkali
Ukuhlolwa kusebenzisa amandla‑izixazululo ze-asidi ezifana ne-sulfuric acid, i-nitric acid, i-hydrochloric acid, i-hydrofluoric acid kanye ne-aqua regia, kanye ne-strong‑izixazululo ze-alkali ezihlanganisa i-sodium hydroxide kanye ne-potassium hydroxide. Lezi zinto zilimaza kakhulu isikhumba nezingubo zabantu, zidinga ukulawulwa kokuphepha kokusebenza ngokucophelela.
Faka izinhlelo zokungenisa umoya ezisebenzayo kanye nezinhlelo zokukhipha umoya ezindaweni lapho kungaqongelela khona umusi we-asidi noma we-alkali.
Abasebenzi kumele bagqoke izinto zokuzivikela ezifanele njengezigilavu zerabha kanye nemishini yokuphefumula.
Ungalokothi uphuze izixazululo ze-pipette acid noma ze-alkali ngomlomo; sebenzisa ama-pipette afakwe amabhalbhu enjoloba.
Qaphela ngesikhathi sokuthuthwa ukuze uvimbele ukugoba noma ukuphuka kwebhodlela. Khomba izikhala zamabhodlela kude nabasebenzi lapho uvula izitsha.
Faka njalo i-sulfuric acid kancane emanzini ukuze kuncibilike. Ungalokothi uthele amanzi ku-sulfuric acid egxilile.
Ngaphambi kokunciphisa ukungcola, ncibilikisa ama-asidi agxilile noma ama-alkali ngamanzi, bese wenza ukunciphisa ukungcola usebenzisa izixazululo ze-alkali noma ze-asidi ezifanele.
Imikhumbi engenalutho eyayikade inama-asidi noma ama-alkali aqinile kufanele ikhishwe amanzi ngokuphelele, ihlanzwe ngamanzi ngokuphindaphindiwe, bese kwenziwa izinqubo zokuhlanza ezijwayelekile.
Uma kwenzeka i-asidi‑ukusha kwe-alkali, hlanza izicubu ezithintekile ngamanzi amaningi agobhozayo ngokushesha. Uma amachaphaza engena emehlweni, nisela amehlo ngokushesha ngamanzi amaningi ompompi. Funa ukwelashwa ngokushesha ngemva kokuhlanza, kungakhathaliseki ukuthi ukusha kungakanani noma ukuthi amehlo athintekile.
2.3 Ukuphathwa Ngokuphephile Kwamagesi
Amagesi okuhlola anikezwa nge-high‑amasilinda okucindezela noma amapayipi egesi. Ukuxuba amagesi athile kungabangela ukusha noma ukuqhuma.
Amasilinda egesi anombala‑amakhodi futhi abhalwe ilebula ukuze kutholakale amagesi aqukethwe. Amasilinda agcina igesi ngomfutho ophezulu; amasilinda asanda kugcwaliswa afinyelela cishe ku-150 kg/cm². Izinyathelo zokuphepha ezikhethekile ziyasebenza ngesikhathi sokugcina nokusetshenziswa.
Gwema ukuchayeka elangeni ngqo kumasilinda egesi ehlobo. Gcina izinto ezivuthayo kanye nemithombo yokushisa kude nesilinda‑izindawo zokugcina.
Gcina amapheya egesi asabela ngokuvutha noma ngokuqhuma lapho ethintana (isib. amasilinda e-hydrogen ne-oxygen) emakamelweni ahlukene ukuze kugwenywe izingozi ezibangelwa ukuvuza kwegesi.
Ungakhiphi igesi yesilinda ngokuphelele; gcina ingcindezi ethile esele ngaphakathi kwesilinda.
Vimbela ukungcoliswa kwamafutha kuma-valve esilinda kanye nama-wren.
Uma usebenzisa i-hydrogen, khipha umoya emishinini ngegesi engasebenzi, hlola lonke uhlelo ukuze lungavuzi, bese ufaka izinto zokuvimba i-flashback.
2.4 Ukuphathwa Ngokuphephile Kwezinto Ezinobuthi
Vimbela ubuthi lapho usebenza ngama-reagents amakhemikhali anobuthi kanye namakhemikhali ekuhlolweni. Izimiso zokuphepha eziyinhloko yilezi ezilandelayo:
Yenza imisebenzi ngaphakathi kwezivalo zomusi. Phatha izinsalela zemfucuza kanye noketshezi lwemfucuza ngaphambi kokuzilahla ezindaweni ezikhethiwe eziphephile.
Gqoka izinto zokuphefumula kanye namagilavu okuzivikela. Gwema ukuthintana kwesikhumba kanye nokugwinya izinto ezinobuthi ngomlomo ngazo zonke izindleko.
Hlanza amagilavu ngokuhlanza kahle ngamanzi ngaphambi kokuwasusa ngemuva kokuqeda ukuhlola.
Isikhathi sokuthunyelwe: Julayi-30-2026