Mu semiconductor-Kuyedza maitiro ekushandisa, kuchenesa makemikari kunoreva kubviswa kwetsvina dzakasiyana-siyana dzinokuvadza kana zvinosvibisa mafuta zvakanyungudutswa pamusoro pezvinhu zve semiconductor, zvinhu zvesimbi nemidziyo yerabhoritari. Kuchenesa kunoshandisa ma reagents emakemikari uye zvinonyungudutsa zve organic kuti zvikonzere mhedzisiro yemakemikari uye mhedzisiro yekunyungudutswa netsvina uye zvinosvibisa mafuta zvakanyungudutswa pamusoro pezvinhu zvebasa. Zviyero zvemuviri zvakaita se ultrasonication, kupisa uye vacuum pumping zvinogona zvakare kushandiswa kubvisa tsvina kubva panzvimbo dzebasa. Zvinhu zvebasa zvinozosukwa nehuwandu hwakawanda hwemafuta akawandisa.-kuchena kunopisa-uye-mvura inotonhora yakacheneswa kuti pave nenzvimbo dzakachena.
1.1 Kukosha kweKuchenesa Makemikoro
Kuchenesa makemikari kunodiwa pakuedza kwega kwega mukuyedza maitiro. Hunhu hwekuchenesa makemikari hune simba guru pamhedzisiro yekuedza. Kuchenesa kusina kunaka kunogona kutungamira mukukundikana kana kusabudirira.-mhedzisiro yekuyedza yemhando yepamusoro. Nokudaro, kunzwisisa mashandiro nemisimboti yekuchenesa makemikari kwakakosha kuti kuyedza kubudirire.
Sezvinozivikanwa, chimwe chinhu chikuru chema semiconductors ndechekuti anonzwa zvakanyanya kusviba. Kunyangwe kutsvaira tsvina pazvikamu.-pa-mamiriyoni emamiriyoni emagetsi anogona kushandura hunhu hwemasemiconductors. Hunhu uhwu hunoshandiswa kugadzira zvishandiso zvesemiconductor zvine mabasa akasiyana-siyana kuburikidza nekushandisa zvinodhaka. Kunyange zvakadaro, hunhu uhwu humwe hunokonzera matambudziko kune masemiconductors.-kuyedza mashandiro emuchina. Makemikari, maturusi ekugadzirisa, nemvura yekuchenesa zvese zvinogona kushanda senzvimbo yekusvibiswa kunokuvadza. Kunyangwe mawafer e semiconductor asina kuchena achasangana nekusvibiswa kunoonekwa mushure mekusangana nemhepo iri munzvimbo kwenguva refu. Kuchenesa makemikari kunobvisa kusvibiswa kunokuvadza uye kunochengetedza silicon yakachena.-pamusoro pewafer.
1.2 Hunhu hweKuchenesa Makemikoro
Kuchenesa makemikari kunonyanya kusanganisira mapoka matatu:
Kucheneswa kwesilicon-pamusoro pewafer;
Kucheneswa kwezvinhu zvesimbi (semuenzaniso, tungsten filaments ye evaporation electrodes, molybdenum sheets ye evaporation supports, alloys dzealuminium dze evaporation sources, chromium ye chromium-kugadzirwa kwemasiki);
Kuchenesa maturusi nemidziyo (semuenzaniso, matweezers esimbi, machubhu equartz, midziyo yegirazi, graphite moulds, zvigadzirwa zvepurasitiki nerabha).
1.3 Mhando dzeKusvibiswa neSilicon-Nzvimbo dzeWafer
(1) Molecular-Rudzi rweKusachena Adsorption
Molekyulu yakajairika-zvinosvibisa zvinonyungudutswa pasilicon-Pamusoro pewafer pane mafuta echisikigo kana ekugadzira, maresini nemafuta. Kusvibiswa kunowanikwa panguva yekucheka substrate, kukuya nekupukuta kunowanzowira muchikamu ichi. Zvimwe zvinhu zvinosanganisira zvigunwe, maresi ephotoresist uye maresidues eorganic akasara.-mari inonyungudutsa.
Molecular-tsvina yemhando iyi inonyanya kunyudzwa mumuviri uye kusungirirwa kune silicon-Nzvimbo dzewafer dzinoshandiswa nemagetsi. Mamorekuru emafuta, resins nemafuta kazhinji haashande-polar. Kubatana kunobva mukukwezvana pakati pemamorekuru asina kuchena uye masimba asina kugutsikana emaatomu esilicon ari pamusoro. Kudyidzana uku kwakaenzana nemasimba evan der Waals pakati pemamorekuru ari mumakristaro emamorekuru. Masimba anokwezva akadaro haana simba uye anoora nekukurumidza nekuwedzera kwedaro repakati pemamorekuru. Range yekudyidzana inoshanda ingangoita 2-3×10⁻⁸masendimita (2)-3 Å), yakaenzana nedhayamita dzemamorekuru. Saka mamorekuru-tsvina yemhando iyi inogona kubviswa zviri nyore.
Chimwe chinhu chikuru ndechekuti mamorekuru mazhinji-zvinhu zvinosvibisa mvura-makemikari asinganyungudike eorganic. Kunyungudika kwawo kunoita kuti silicon-pamusoro pewafer pane hydrophobic, izvo zvinotadzisa kubatana zvakanaka pakati pemvura yakabviswa ioni / acid-mhinduro dzealkali nepamusoro pewafer. Izvi zvinodzivirira ma reagents kuti asashande nezvidimbu zvepamusoro uye zvinodzivisa kuchenesa makemikari zvinobudirira.
(2) Ionic-Rudzi rweKusachena Adsorption
Ioni yakajairika-gadzira tsvina inonyungudutswa pasilicon-nzvimbo dzewafer dzinosanganisira K⁺, Na⁺, Ca²⁺, Mg²⁺, Fe²⁺, H⁺, OH⁻, F⁻, Cl⁻, S²⁻, CO₃²⁻nezvimwewo. Tsvina iyi inobva kunzvimbo dzakasiyana-siyana: mhepo iri munzvimbo, midziyo nemidziyo, makemikari,-mvura yakachena isina maayina, mvura yepombi, mweya unobuda uye ziya rinobuda.
Ionic-Kunyudzwa kwemhando ye "adsorption" kunonyanya kushandiswa ne "chemisorption". Ma "ion" asina kuchena anobatanidzwa pamusoro pe "wafer" kuburikidza nemakemikari.-masimba ekubatana. Kureba kwakaenzana pakati pemaion asina kuchena nemaatomu epamusoro kupfupi zvikuru, zvekuti maion akanyudzwa anogona kuonekwa sechikamu chesilicon lattice. Kusvibiswa kweionic kwakasanganiswa nemakemikari kunogona kushanda senzvimbo dzekutapa: mamwe anosunga maerekitironi elattice asina kuchena uye anoshanda seanogamuchira; mamwe anobata maburi asina kuchena uye anoshanda sevanopa. Nekuda kwemasimba akasimba emakemikari, kubvisa tsvina yeionic kwakaoma kupfuura kubvisa tsvina yemamorekuru.
(3) Atomu-Rudzi rweKusachena Adsorption
Atomu-Zvinhu zvinosvibisa pamusoro pechinhu zvinonyanya kuve maatomu esimbi akadai segoridhe, sirivha, mhangura, simbi uye nickel. Maatomu aya esimbi anowanzo gadzirwa nekuchinja kwekuchinja kwezvinhu mu acidic etchants, zvichizoiswa pasilicon.-pamusoro pewafer.
Atomu-Kudzvinyirirwa kwemhando iyi kunoratidza simba rakasimba rekubatanidza uye kwakaoma kubvisa.-maatomu esimbi akadai segoridhe neplatinum haawanzo sangana nemaacids nemaalkali. Saka ma reagents akakosha akadai seaqua regia anodiwa kuti aumbe macomplexes anonyungudika. Mhando dzesimbi dzakaoma dzinozobviswa nemafuta akawanda.-mvura yakachena isina ioni.
1.4 Silicon Yakajairika-Maitiro Ekuchenesa Wafer
Sezvakaongororwa pamusoro apa, mamorekuru-tsvina yemhando iyi iri nyore kubvisa. Zvinosvibisa zvemamorekuru zvinosara zvinogona kufukidza ionic-uye atomu-tsvina uye dzivhare kubviswa kwayo. Saka, tsvina yemamorekuru inofanira kubviswa zvizere kutanga panguva yesilicon-kuchenesa makemikari ewafer.
Ionic-uye atomu-tsvina yemhando iyi inosanganiswa nemakemikari ane hukama hwakasimba pamusoro. Zvinosvibisa atomu zvinowanzovapo muhuwandu hushoma uye hazvisangani nemaasidhi akajairika uye alkalis; zvinogona kungonyungudutswa ne aqua regia kana acidic hydrogen.-mhinduro dzeperoxide. Aqua regia neacidic hydrogen peroxide zvinonyungudutsawo tsvina yeionic. Nzira yakajairika yekushandisa iacid-mishonga yealkali kana alkaline hydrogen peroxide kubvisa tsvina yeionic kutanga. Zvinosvibisa zveionic zvakasara uye tsvina yemaatomu zvinozobviswa uchishandisa aqua regia kana acidic hydrogen peroxide. Sukurudza kekupedzisira ne high-kuchena kwemvura isina ioni kunopedzisa maitiro acho.
Muchidimbu, silicon yakajairika-Kucheneswa kwewafer ndekwekuti: Kubvisa mafuta→Kubviswa kweIon→Atomu-kubviswa kwetsvina→Yakabviswa pakuva ioni-kusukwa nemvura.
Mawafer esilicon anofanirwa kucheneswa nemakemikari nguva dzese dzisati dzaitwa. Kunyange zvakadaro, mamiriro epamusoro anosiyana kubva pakumhanya kusvika pakumhanya. Saka, makemikari ekuchenesa uye zvinangwa zvekutanga zvinosiyana zvichienderana. Mafambiro ekuchenesa anoshanda anochinjika. Nzira dzakasimba uye matanho anofanira kusarudzwa pachiitiko.-by-hwaro hwenyaya zvichienderana nekucheneswa chaiko-zvinodiwa pakuita basa.
1.5 Kuchenesa Simbi Nemidziyo Yakajairika
Zvinhu zvesimbi uye zvishandiso zverabhoritari ndizvo zvinonyanya kukonzera silicon-kusvibiswa kwewafer. Kucheneswa kwesimbi nemidziyo zvakakwana kunodiwa kuti uve nechokwadi chekuti wafer-kuchena pamusoro. Nheyo huru yekuchenesa simbi nemidziyo ndeyekuti: bvisai mafuta akasviba kutanga; bvisai kana kugeza neacids, alkalis, washing solutions kana aqua regia; uye pedzisai nekusuka zvakanaka nemafuta akawanda.-mvura yakachena isina ioni.
2 Ruzivo rweKuchengetedzeka
Kuedza kunowanzo shandisa makemikari akasiyana-siyana nemagasi, kusanganisira acid inobvira, inoputika, ine chepfu uye inoparadza-zvinhu zvine alkali. Kusashanda zvakanaka kunogona kukonzera tsaona. Matanho ekudzivirira anofanira kutorwa seakakosha. Kana tsaona ikaitika, ramba wakadzikama uye ita matanho akakodzera ekugadzirisa nekukurumidza.
2.1 Kubata Zvakachengeteka Zvinonyungudutsa Zveorganic
Zvinonyungudutsa zve organic zvinosanganisira toluene, acetone, ethanol, methyl ethyl ketone, trichloroethylene uye carbon tetrachloride. Zvinyungudutsa zve organic zvakawanda zvinobvira uye zvinobatidza kana paine kupisa kwakanyanya.-mamiriro ekupisa kana pedyo nemoto wakashama. Zvichengete munzvimbo dzinotonhorera kure nenzvimbo dzinobatidza moto. Usapise midziyo inonyungudutsa zvakananga pazvitofu zvemagetsi; mvura-Kudziisa mubhavhu kunosarudzwa kana kuchidikanwa kudziisa. Kana moto wabvira, dzima moto nejira rakanyorova, jecha rakatsetseka, kabhoni-zvinodzima moto zvedioxyde, kabhoni-zvidzimisi zve tetrachloride kana zvidzimisi zve furo. Usamboisa mvura kana mvura-asidhi yakavakirwa-zvinodzima moto zvine alkali.
Zvinonyungudutsa zvemuchadenga zvinoshanduka-shanduka uye zvine chepfu yakasiyana-siyana. Mabasa ese anofanira kuitwa mukati memagirazi emoto ane mhepo yakakwana.
2.2 Kubata Asidhi neAlkali Zvakachengeteka
Kuedza kunoshandisa simba-mhinduro dzeasidhi dzakadai sesulfuric acid, nitric acid, hydrochloric acid, hydrofluoric acid uye aqua regia, pamwe chete ne strong-mishonga yealkali inosanganisira sodium hydroxide nepotassium hydroxide. Zvinhu izvi zvinokuvadza zvakanyanya ganda revanhu nezvipfeko, zvichida kutarisirwa kwakanyatsoitwa kwekuchengetedzwa.
Isai nzira dzinoshanda dzekufema uye dzekuburitsa mweya munzvimbo dzinogona kuungana acid kana alkali.
Vashandi vanofanira kupfeka zvinhu zvekudzivirira zvakakodzera zvakaita semagirovhosi erabha uye zvinofema.
Usambofa wakanwa mvura ine asidhi kana alkali; shandisa mapipettes ane rabha bulbs.
Chenjerera paunenge uchitakura kuti mabhodhoro asadonha kana kupwanyika. Isa maburi emabhodhoro kure nevashandi paunenge uchivhura magaba.
Gara uchiisa sulfuric acid zvishoma nezvishoma mumvura kuti inyunguduke. Usambofa wadira mvura mu sulfuric acid yakakora.
Usati waita kuti mvura isatsvedze, sanganisa maasidhi akawandisa kana maalkali nemvura, wobva waita kuti mvura isatsvedzere uchishandisa maalkali kana maasidhi anoenderana nawo.
Midziyo isina chinhu yaimbova neacid yakawanda kana alkali inofanira kusvinwa mvura yose, yozoraswa mvura kakawanda, yozocheneswa nguva nenguva.
Kana paine acid-kutsva kwealkali, sukurudza nyama yakakuvara nemvura yakawanda inoyerera nekukurumidza. Kana madonhwe emvura akapinda mumaziso, nyorovesa maziso nekukurumidza nemvura yakawanda yepombi. Tsvaga rubatsiro rwechiremba nekukurumidza mushure mekusukurudza, zvisinei nekuti kutsva kwakanyanya sei kana kuti maziso akatarisana nechinhu chakadaro.
2.3 Kubata Magasi Zvakachengeteka
Magasi ekuyedza anopiwa kuburikidza ne high-masirinda ekumanikidza kana mapaipi egasi. Kusanganisa mamwe magasi kunogona kukonzera kutsva kana kuputika.
Masilinda egasi ane ruvara-dzakanyorwa uye dzakanyorwa kuti dzione magasi aripo. Masirinda anochengeta gasi pakumanikidzwa kwakanyanya; masirinda achangozadzwa anosvika anenge 150 kg/cm². Matanho akakosha ekuchengetedza anoshanda panguva yekuchengetera nekushandisa.
Dzivisai kuvhenekerwa nezuva zvakananga nemasilinda egasi muzhizha. Chengetai zvinhu zvinobvira moto uye zvinhu zvinobatidza moto kure nesilinda-nzvimbo dzekuchengetera zvinhu.
Chengeta mapeya maviri egasi anobatidza kana kuti anoputika kana akabatana (semuenzaniso masilinda ehydrogen neokisijeni) mumakamuri akasiyana kuti udzivise tsaona dzinokonzerwa nekubuda kwegasi.
Usabudise gasi remuchina wekusimbisa muviri zvachose; chengetedza simba rakati remuchina wekusimbisa muviri mukati memasirinda.
Dzivisa kusvibiswa kwemafuta pamavharuvhu esilinda nemabhurenji.
Paunenge uchishandisa hydrogen, bvisa mweya mumidziyo uchishandisa gasi risina simba, tarisa system yese kuti isabudise mvura here, uye isa zvinhu zvinodzivirira kudonha kwemhepo.
2.4 Kubata Zvinhu Zvine Chepfu Zvakachengeteka
Dzivisa chepfu kana uchishanda nemakemikari ane chepfu uye mishonga mukuyedza. Nheyo huru dzekuchengetedza ndeidzi:
Ita mabasa mukati memagirazi emoto. Chengeta marara nezvinwiwa zvisina kuchena usati wazvirasa panzvimbo dzakachengeteka.
Pfeka ma respirators nemagurovhosi ekudzivirira. Dzivisa kusangana neganda uye kunwa zvinhu zvine chepfu nemuromo chero zvodini.
Sukurudza magirovhosi nemvura zvakanaka usati waabvisa mushure mekupedza kuedza.
Nguva yekutumira: Chikunguru-30-2026