Mu semiconductor‑Kuyesa kwa njira ya chipangizo, kuyeretsa mankhwala kumatanthauza kuchotsa zonyansa zosiyanasiyana zovulaza kapena zodetsa mafuta zomwe zimamatiridwa pamwamba pa ma semiconductors, zipangizo zachitsulo ndi ziwiya za labotale. Kuyeretsa kumagwiritsa ntchito ma reagents a mankhwala ndi zosungunulira zachilengedwe kuti ziyambe kuyankhidwa ndi zotsatira za mankhwala ndi zotsatira za kusungunuka ndi zodetsa ndi zodetsa mafuta zomwe zimamatiridwa pamwamba pa zinthu zogwirira ntchito. Njira zakuthupi monga ultrasound, kutentha ndi kupopera vacuum zingagwiritsidwenso ntchito kuchotsa zodetsa kuchokera pamalo ogwirira ntchito. Zinthu zogwirira ntchito zimatsukidwa ndi mafuta ambiri.‑chiyero chotentha‑ndi‑madzi ozizira oyeretsedwa kuti mupeze malo oyera.
1.1 Kufunika kwa Kuyeretsa Mankhwala
Kuyeretsa mankhwala ndikofunikira pa mayeso aliwonse oyesera. Ubwino wa kuyeretsa mankhwala umakhudza kwambiri zotsatira za mayeso. Kuyeretsa kosayenera kungayambitse kulephera kapena kusagwira bwino ntchito.‑Zotsatira zabwino zoyeserera. Chifukwa chake, kumvetsetsa ntchito ndi mfundo za kuyeretsa mankhwala ndikofunikira kuti mayeso oyeserera apambane.
Monga momwe zimadziwikira, chinthu chimodzi chofunikira kwambiri cha ma semiconductors ndichakuti amatha kukhudzidwa kwambiri ndi zinthu zodetsa. Ngakhale zinthu zodetsa zimatsatira ngakhale zinthu zodetsa zomwe zili m'zigawozo.‑pa‑miliyoni imodzi ingasinthe mawonekedwe enieni a ma semiconductor. Katunduyu amagwiritsidwa ntchito popanga zida za semiconductor zokhala ndi ntchito zosiyanasiyana kudzera mu doping. Komabe, katundu yemweyu amabweretsa mavuto kwa ma semiconductor.‑Kuyesera kwa njira yogwiritsira ntchito chipangizochi. Ma reagents a mankhwala, zida zoyeretsera, ndi madzi oyeretsera zonse zitha kukhala magwero a kuipitsidwa koopsa kwa zinyalala. Ngakhale ma wafers oyera a semiconductor amatha kuipitsidwa kwambiri akakhala ndi mpweya wozungulira kwa nthawi yayitali. Kuyeretsa kwa mankhwala kumachotsa kuipitsidwa koopsa kwa zinyalala ndikusunga silicon yoyera.‑pamwamba pa chivundikiro cha wafer.
1.2 Kuchuluka kwa Kuyeretsa Mankhwala
Kuyeretsa mankhwala kumaphatikizapo magulu atatu:
Kuyeretsa kwa silicon‑pamwamba pa nsalu yopyapyala;
Kuyeretsa zinthu zachitsulo (monga ulusi wa tungsten wa ma electrode otulutsa mpweya, mapepala a molybdenum othandizira kuuluka, zitsulo za aluminiyamu zotulutsira madzi, chromium ya chromium‑kupanga masks);
Kuyeretsa zida ndi ziwiya (monga ma tweezers achitsulo, machubu a quartz, zotengera zagalasi, zinyalala za graphite, zinthu zapulasitiki ndi rabara).
1.3 Mitundu ya Zodetsa Zoyipa pa Silicon‑Malo Ophikira Pang'onopang'ono
(1) Mamolekyulu‑Mtundu wa Kusayera Kusambitsidwa
Ma molekyulu wamba‑kupanga zinthu zodetsa zomwe zimamatira pa silicon‑Malo ophikira a wafer amakhala ndi mafuta achilengedwe kapena opangidwa ndi zinthu zina, utomoni ndi mafuta. Zodetsa zomwe zimachitika podula, kupukuta ndi kupukuta pansi pa nthaka nthawi zambiri zimakhala m'gululi. Magwero ena ndi monga zala, zotsalira za photoresist ndi zotsalira za organic.‑zosungira zosungunulira.
Mamolekyulu‑Zonyansa zamtundu wamtunduwu nthawi zambiri zimakhudzidwa ndi silicon‑Ma wafer pamwamba pa zinthu zokokedwa ndi magetsi. Mamolekyulu a mafuta, utomoni ndi mafuta nthawi zambiri samakhala‑polar. Kugwirizana kumabwera chifukwa cha kukopana pakati pa mamolekyu osadetsedwa ndi mphamvu zotsalira zosakhutitsidwa za maatomu a silicon pamwamba. Kuyanjana kumeneku kuli kofanana ndi mphamvu za van der Waals pakati pa mamolekyu mu makhiristo a mamolekyu. Mphamvu zokongola zotere zimakhala zofooka ndipo zimawonongeka mofulumira ndi mtunda wokulirapo pakati pa mamolekyu. Kulumikizana kogwira mtima ndi pafupifupi 2‑3×10⁻⁸masentimita (2)‑3 Å), yofanana ndi ma dayamita a mamolekyulu. Chifukwa chake mamolekyulu‑Zonyansa zamtundu wina zimatha kuchotsedwa mosavuta.
Chinthu china chachikulu ndi chakuti mamolekyu ambiri‑zinthu zodetsa ndi madzi‑mankhwala achilengedwe osasungunuka. Kulowetsedwa kwawo kumapangitsa silicon kukhala‑pamwamba pa wafer pali hydrophobic, zomwe zimalepheretsa kukhudzana bwino pakati pa madzi / asidi ochotsedwa mu ioni‑Mayankho a alkali ndi malo ophikira. Izi zimaletsa ma reagents kuti asagwirizane ndi tinthu ta pamwamba ndipo zimalepheretsa kuyeretsa bwino mankhwala.
(2) Ionic‑Mtundu wa Kusayera Kusambitsidwa
Ioni wamba‑kupanga zinthu zodetsedwa zomwe zimamatira pa silicon‑pamwamba pa wafer pali K⁺, N / A⁺, Ca²⁺, Mg²⁺, Fe²⁺, H⁺, OH⁻, F⁻, Cl⁻, S²⁻, CO₃²⁻ndi zina zotero. Zonyansa zimenezi zimachokera ku magwero osiyanasiyana: mpweya wozungulira, ziwiya ndi zida, mankhwala,‑madzi oyera opanda ayoni, madzi a pampopi, mpweya wotuluka ndi thukuta la wogwiritsa ntchito.
Ionic‑Kulowetsedwa kwa mtundu wa ma adsorption makamaka kumachokera ku chemisorption. Ma ayoni odetsedwa amalumikizana ndi malo osungunuka kudzera mu mankhwala‑mphamvu zomangira. Mtunda wofanana pakati pa ma ayoni odetsedwa ndi maatomu a pamwamba ndi waufupi kwambiri, kotero kuti ma ayoni odetsedwa amatha kuonedwa ngati gawo la lattice ya silicon. Zonyansa za ionic zosungunuka ndi chemisorbed zimatha kugwira ntchito ngati malo otsekera: zina zimamangirira ma elekitironi omasuka ndikugwira ntchito ngati zolandirira; zina zimakola mabowo omasuka ndikugwira ntchito ngati zopereka. Chifukwa cha mphamvu zamphamvu za chemisorption, kuchotsa zonyansa za ionic kumakhala kovuta kwambiri kuposa kuchotsa zodetsa za mamolekyu.
(3) Atomiki‑Mtundu wa Kusayera Kusambitsidwa
Atomiki‑Zinthu zodetsa pamwamba zimakhala makamaka maatomu achitsulo monga golide, siliva, mkuwa, chitsulo ndi nikeli. Maatomu achitsulo amenewa nthawi zambiri amapangidwa ndi zinthu zochepetsera kusamuka m'ma etchants a acidic, zomwe zimayikidwa pa silicon.‑pamwamba pa chivundikiro cha wafer.
Atomiki‑Kulowetsa kwa mtundu wa adsorption kumasonyeza mphamvu yamphamvu kwambiri yomangirira ndipo n'kovuta kwambiri kuchotsa.‑maatomu achitsulo monga golide ndi platinamu sachitapo kanthu ndi ma acid ndi ma alkali wamba. Chifukwa chake, ma reagents apadera monga aqua regia amafunika kuti apange ma complexes osungunuka. Mitundu yachitsulo yosakanikirana imatsukidwa ndi madzi ambiri.‑madzi oyera opanda ioni.
1.4 Silikoni Yaikulu‑Njira Yoyeretsera Ma Wafer
Monga momwe tafotokozera pamwambapa, ma molecular‑Zonyansa zamtundu wa ioni n'zosavuta kuchotsa. Zonyansa zotsala za mamolekyu zimatha kubisa ma ioni‑ndi atomiki‑sungani zodetsa ndi kuletsa kuchotsedwa kwawo. Chifukwa chake, zodetsa za mamolekyu ziyenera kuchotsedwa kwathunthu kaye panthawi ya silicon‑kuyeretsa mankhwala a wafer.
Ionic‑ndi atomiki‑Zonyansa zamtundu wa chemisorbed zimakhala ndi mphamvu yayikulu pamwamba. Zonyansa za atomiki nthawi zambiri zimapezeka zochepa ndipo sizimasakanikirana ndi ma acid ndi alkali wamba; zimatha kusungunuka ndi aqua regia kapena acidic hydrogen.‑Mayankho a peroxide. Madzi a regia ndi asidi hydrogen peroxide amasungunulanso zinthu zodetsa za ayoni. Njira yodziwika bwino yogwirira ntchito imagwiritsa ntchito asidi‑Mayankho a alkali kapena alkaline hydrogen peroxide kuti muchotse kaye zonyansa za ionic. Zotsalira za ionic zodetsa ndi zonyansa za atomiki zimachotsedwa pogwiritsa ntchito aqua regia kapena acidic hydrogen peroxide. Kutsuka komaliza ndi mafuta ambiri‑Madzi oyera opanda ioni amatsiriza ntchitoyi.
Mwachidule, silicon wamba‑Kuyeretsa wafer ndi: Kuchotsa mafuta→Kuchotsa ayoni→Atomiki‑kuchotsa zonyansa→Kuchotsedwa‑kutsuka ndi madzi.
Ma wafer a silicon ayenera kutsukidwa ndi mankhwala asanayesedwe kalikonse. Komabe, momwe zinthu zilili pamwamba zimasiyana malinga ndi nthawi yomwe akuyendera. Chifukwa chake, mankhwala oyeretsera ndi zolinga zoyambirira zimasiyana malinga ndi nthawi yomwe akuyendera. Njira zoyeretsera zogwiritsidwa ntchito moyenera zimasinthasintha. Njira zenizeni ndi masitepe ziyenera kutsimikiziridwa pa mlandu.‑by‑maziko a milandu malinga ndi kuyeretsa kwenikweni‑zofunikira pa zotsatira.
1.5 Kuyeretsa Zitsulo ndi Ziwiya Zogwiritsidwa Ntchito
Zipangizo zachitsulo ndi zida za labotale ndi magwero akuluakulu a silicon‑Kuipitsidwa kwa wafer. Kuyeretsa bwino zitsulo ndi ziwiya ndikofunikira kuti wafer ipezeke‑Kuyeretsa pamwamba. Mfundo yofunikira kwambiri yoyeretsera zitsulo ndi ziwiya ndi iyi: choyamba chotsani mafuta oipitsa; chotsani kapena kutsuka ndi ma acid, alkali, madzi otsukira kapena aqua regia; ndipo malizitsani mwa kutsuka bwino ndi madzi ambiri.‑madzi oyera opanda ioni.
2 Chidziwitso cha Chitetezo
Kafukufuku nthawi zambiri amagwiritsa ntchito mankhwala ndi mpweya wosiyanasiyana, kuphatikizapo asidi woyaka, wophulika, woopsa komanso wowononga‑Zinthu za alkali. Kusagwiritsa ntchito bwino zinthu kungayambitse ngozi. Njira zodzitetezera ziyenera kuyikidwa patsogolo. Ngati ngozi yachitika, khalani chete ndikuchitapo kanthu koyenera kokonza zinthu mwachangu.
2.1 Kusamalira Motetezeka Zosungunulira Zachilengedwe
Zosungunulira zachilengedwe zomwe zimagwiritsidwa ntchito kwambiri ndi toluene, acetone, ethanol, methyl ethyl ketone, trichloroethylene ndi carbon tetrachloride. Zosungunulira zachilengedwe zambiri zimatha kuyaka ndipo zimayaka pamene kutentha kwambiri.‑kutentha kapena pafupi ndi malawi otseguka. Zisungeni pamalo ozizira kutali ndi zinthu zoyatsira moto. Musatenthetse ziwiya zosungunulira madzi mwachindunji pa zitofu zamagetsi;‑Kutentha m'bafa ndi bwino ngati kutentha kuli kofunikira. Ngati moto wabuka, zimitsani malawi ndi nsalu yonyowa, mchenga wabwino, ndi kaboni.‑zozimitsira moto za kaboni,‑zozimitsira moto za tetrachloride kapena zozimitsira moto za thovu. Musamaike madzi kapena madzi‑asidi wopangidwa kuchokera ku‑zozimitsira moto za alkali.
Zosungunulira zachilengedwe zimakhala zosinthasintha ndipo zimakhala ndi poizoni wosiyanasiyana. Ntchito zonse ziyenera kuchitika mkati mwa malo osungira utsi okhala ndi mpweya wokwanira.
2.2 Kusamalira Motetezeka Asidi ndi Ma Alkali
Mayesero amagwiritsa ntchito mphamvu‑Mayankho a asidi monga sulfuric acid, nitric acid, hydrochloric acid, hydrofluoric acid ndi aqua regia, komanso amphamvu‑Ma alkali solutions kuphatikizapo sodium hydroxide ndi potaziyamu hydroxide. Zinthuzi zimawononga kwambiri khungu ndi zovala za anthu, zomwe zimafuna kusamala kwambiri pakugwira ntchito kwa chitetezo.
Ikani njira zopumira bwino komanso zotulutsira mpweya m'malo omwe asidi kapena alkali angaunjikane.
Ogwira ntchito ayenera kuvala zida zoyenera zodzitetezera monga magolovesi a rabara ndi zopumira.
Musagwiritse ntchito mankhwala a pipette acid kapena alkali pakamwa; gwiritsani ntchito ma pipette okhala ndi mababu a rabara.
Samalani mukamayenda kuti mabotolo asagwe kapena kusweka. Lowetsani mabotolo kutali ndi ogwira ntchito mukatsegula zidebe.
Nthawi zonse onjezerani sulfuric acid pang'onopang'ono m'madzi kuti muchepetse kukhuthala. Musathire madzi mu sulfuric acid yokhuthala.
Musanagwiritse ntchito njira yochepetsera kukhuthala kwa madzi, sakanizani ma asidi kapena ma alkali osungunuka ndi madzi, kenako chitani njira yochepetsera kukhuthala pogwiritsa ntchito njira zofananira za alkali kapena ma acid.
Mitsempha yopanda kanthu yomwe kale inali ndi ma acid kapena alkali ambiri iyenera kutsukidwa kwathunthu, kutsukidwa ndi madzi mobwerezabwereza, kenako kutsukidwa nthawi zonse.
Ngati asidi‑Ngati madzi alowa m'maso, thirirani maso mwachangu ndi madzi ambiri a m'mphepete mwa madzi. Pezani chithandizo chamankhwala mwamsanga mukatsuka, mosasamala kanthu za kutentha kwambiri kapena kukhudzana ndi maso.
2.3 Kusamalira Mpweya Motetezeka
Mpweya woyesera umaperekedwa kudzera mu‑masilinda opondereza kapena mapaipi a gasi. Kusakaniza mpweya wina kungayambitse kuyaka kapena kuphulika.
Masilinda a gasi ndi amtundu‑zolembedwa ndi zilembo kuti zizindikire mpweya womwe uli mkati. Masilinda amasunga mpweya pa mphamvu yayikulu; masilinda atsopano odzazidwa amafika pafupifupi 150 makilogalamu/cm²Malangizo apadera otetezera amagwiritsidwa ntchito posungira ndi kugwiritsa ntchito.
Pewani kukhudzana ndi dzuwa mwachindunji ndi masilinda a gasi nthawi yachilimwe. Sungani zinthu zomwe zimayaka moto ndi zinthu zoyatsira moto kutali ndi silinda.‑malo osungiramo zinthu.
Sungani magasi awiriawiri omwe amayatsa kapena kuphulika akakhudzana (monga ma silinda a haidrojeni ndi okosijeni) m'zipinda zosiyana kuti mupewe ngozi zomwe zimachitika chifukwa cha kutuluka kwa mpweya.
Musatulutse mpweya wonse wa silinda; sungani mphamvu yotsala mkati mwa silinda.
Pewani kuipitsidwa kwa mafuta pa ma valve a masilinda ndi ma wrench.
Mukagwiritsa ntchito haidrojeni, chotsani mpweya m'zida ndi mpweya wosagwira ntchito, yang'anani dongosolo lonse kuti liwone ngati likutuluka madzi, ndikuyika zoletsa kubwereranso.
2.4 Kusamalira Zinthu Zapoizoni Motetezeka
Pewani poizoni mukamagwiritsa ntchito mankhwala oopsa komanso mankhwala enaake mukamayesa. Mfundo zazikulu zotetezera ndi izi:
Chitani ntchito mkati mwa malo osungira utsi. Thirani zinyalala ndi zakumwa zonyansa musanazitaye pamalo otetezeka.
Valani zopumira mpweya ndi magolovesi oteteza. Pewani kukhudzana ndi khungu ndi kumwa zinthu zapoizoni pakamwa zivute zitani.
Tsukani magolovesi bwino ndi madzi musanawachotse mukamaliza kuyesa.
Nthawi yotumizira: Julayi-30-2026